7.3Baking the STP Pump | Seiko Instruments MT-17E-003-D specification

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Seiko Instruments MT-17E-003-D instruction manual 7.3Baking the STP Pump

Contents

STP-H600/H1000Series Third Edition-dMT-17E-003-D SAFETY PRECAUTIONS SymbolsDeath or Serious Personal Injury Operators can burn hands Connect or disconnect cables DO NOT put foreign objects into the STP pump. Doing so may result in product damage INTRODUCTION APPLIED STANDARDSApplied Directives EC Machinery Directive EC Electromagnetic Compatibility Directive PRECAUTIONS REQUESTSeiko Instruments Inc Sales Office Japan LIMITED WARRANTY 16Overhaul and replacement of maintenance parts indication “WARNING” message on the LCD displayTouch down bearing Heater TABLE OF CONTENTS 7 Gas Suction, Cooling and Baking the STP Pump 12 Maintenance and Inspection TABLES FIGURES 1 Precautions for Safe Operation of the STP Pump 1.3Inspection Precautions 1.4Labels 3Heavy Product Caution Label 6Connector Caution Label 200～240V 浮上調整を行う場合は弊社のトレーニングまたは許可を受けてください。 Tuning must be performed 2 Unpacking 2.2Unpacking the STP Control Unit 3 Installation of the STP pump 3.1Name and Function of Each PartNEVER remove it 9 Temperature Sensor Connector Optional Accessory 6 Cooling Water Port 3 STP Connector4 Motor Connector 8 Ground Terminal Figure 3.1 Configuration of the STP Pump 3.2Precautions Before Installation 3.2.2Installation Area 3.3How to Install the STP Pump 3.3.1Cleaning the Seal 3.3.2STP Pump Installation Positions Figure 3.3 STP Pump Installation PositionsUpside-down Horizontal STP Pump Slanted Vertical Size of bolt Tightening torque of bolt Nm12.0 24.1 a When the base is not secured When securing the inlet port with boltsRecommended fitting bolt for flange Secure the base Size of Flange Number of Claw ClampsISO 160 or less 4 or more Vacuum Equipment 3.3.4Vacuum Piping 1Piping at the Inlet Port Flange 3.3.5Connecting the Emergency Vent. Valve 3.3.7Connecting the Ground Cable 4 Installation of the STP Control Unit 4.1Name and Function of Each Part4.1.1Front Panel 8OVER TEMPERATURE Lamp red LED Figure 4.1 STP Control Unit Front Panel 4.1.2Rear Panel Figure 4.2 STP Control Unit Rear Panel 4.1.3Inside of the STP Control Unit 2530 Figure 4.3 Inside of the STP Control Unit 4.2Precautions Before Installation 4.2.1Operating Environment 4.2.2Installation Area part Secure with screw Support Angle 4-10 4.4.1Name and Dimensions of Each Cable Figure 4.6 External Dimensions of Each Cable4.4Cable Connection STP Control Unit Side Figure 4.7 External Dimensions of he Power Cable 4.4.2How to Connect the Cables STP-H600/H1000 Series Table 4.1 Connecting Primary Power Cable Figure 4.8 How to Secure Primary Power Cable Magnified TB1 TB1 Cover Ground Cable for CoverCable Fitting Tool 5 How to Start/Stop the STP Pump 5.3Start Procedures REMOTE Select one which fits your vacuum equipment5.5.1Powering ON 5.5Manual Operation 5.5.5Powering OFF 5.6.1Powering ON 5.6Remote Operation5.6.2Starting/Stopping the STP Pump 5.6.3Starting the STP Pump After Stopping 5.6.4Powering OFF 6.1Safety Functions 6.1.1Power Failure Operation after a Power Recovery 6.1.2Abnormal State of Magnetic Bearing 6.1.3Excessive Vibration6.1.4Inverter Overload 6.1.5Overheating Inside the STP pump 6.1.8Abnormal Battery Voltage 6.2Restarting after Any Safety Function Operates 3Other Cases 6.3Operation of the Emergency Vent. Valve Abnormality Abnormality 7 Gas Suction, Cooling and Baking the STP Pump 7.2Cooling the STP Pump 7.2.2Air Cooling Method 7.3Baking the STP Pump This label is attached to the baking heater Failure to do so may result in electric shock 8 Remote Input/Output Signal Terminal Blocks N.O OUT I/O TB2 Remote Output Signal Terminal Block Table 8.3 Rated Contacts for Relays CR5 and Page L.VALVE DC I/O TB3 START IN STOP INThe screw for the terminal is M4*1 START/STOP IN 8.4START/STOP TB6 Terminal BlockThe screw for the terminal is M4*1 DO NOT apply excessive force to the remote cable 9 Internal Battery Figure 9.1 Life of the Internal Battery 9.3How to Charge the Internal BatteryBattery Figure 9.2 Allowable Shelf Life of the Internal 9.4BATTERY NG Lamp 9.5How to Replace the Internal Battery 2Disconnect battery internal connector Affix this label to the front panel 5 Figure 9.1 How to Replace the Internal Battery2 8 1 4 10 3 5 11 9.6How to Dispose of the Internal Battery 10 External Battery 10.2Installation of the External Battery 10.3How to Charge the External Battery 11 Operation Principle of the STP Pump 7 Touch down bearing 8 Touch down bearing 1 Rotor blade 2 Stator blade4 Radial electromagnet 3 Radial sensor 3 Radial sensor 4 Radial electromagnet 12 Maintenance and Inspection 12.3Replacing the Fuses 12.4Inspecting for Deposit 12.5Overhaul 12.6Transporting for Repair or Overhaul 13 Storage 13.1The STP Pump 13.3Restarting Precautions 13.2The STP Control Unit 14 Disposal 14.3The Battery 15 Troubleshooting 3Other Cases 15.4Abnormalities While the STP Pump is Rotating Symptom The lamp is being lit PROCEDU Lamp Being LitProbable Causes Countermeasures No.4 No.6 16 Specifications and Accessories 16.1Specifications for the STP Pump16-1 16.216.2 Specifications for the STP Control Unit Page 16.3Accessories Table 16.3 Accessories16.4Recommended Spare Parts 16-4 STP-H600/H1000 Unit Instruction ManualInstall pump securely SEIKO SEIKI performed be should Tuning SAFETY INSTRUCTIONSSEIKO SEIKI caution with Handle やけどします。触らないでください。 Hot surface STP PUMP PROBLEM CHECK SHEET Seiko Seiki CommentDate Name Length MassPressure Sales Office Japan