Field of view cleanness
Allowed spot | I ZONE | II ZONE | III ZONE | |
0 - 5, 6 | 5, 6 - 14,7 | 14,7 - 17, 5 | ||
diameter, μm | ||||
mm | mm | mm | ||
| ||||
|
|
|
| |
Over 250 | 0 | 0 | 0 | |
|
|
|
| |
150 to 250 | 0 | 0 | 1 | |
|
|
|
| |
100 to 150 | 0 | 2 | 2 | |
|
|
|
| |
50 to 100 | 1 | 3 | 3 | |
|
|
|
| |
0 to 50 |
| Not specified |
| |
|
|
|
|
7
Allowed spot | I ZONE | II ZONE | III ZONE | |
0 - 5, 6 | 5, 6 - 14,7 | 14,7 - 17, 5 | ||
diameter, μm | ||||
mm | mm | mm | ||
| ||||
|
|
|
| |
Over 250 | 0 | 0 | 0 | |
|
|
|
| |
150 to 250 | 0 | 0 | 1 | |
|
|
|
| |
100 to 150 | 0 | 2 | 2 | |
|
|
|
| |
50 to 100 | 1 | 3 | 3 | |
|
|
|
| |
0 to 50 |
| Not specified |
| |
|
|
|
|
7