For Safe Handling
Warnings in the Operating Manual
Warnings provided in this manual and where they occur are summarized below.
●This system does not have components that require 
Danger signs.
Warning Indicators
●Burns from the Rotary Pump
■If it stops abnormally the rotary pump remains hot. Touching it can cause burns. Do not touch the rotary pump in the event of an abnormal stoppage.
(Chapter 4 Maintenance)
●Burns from Touching the Filament Assembly
■When the filament assembly is replaced, it can be as hot at 90℃. Touching it can cause burns. When replacing a filament assembly, turn off the acceleration voltage, and let the assembly stand for 30 minutes or longer after the air is let in before working on it.
Or, execute the filament exchange by using heatproof gloves of the clean room specification.
(Chapter 4 Maintenance)
●Beware of Electric Shock
■Voltages up to 100 V AC and 30 kV DC are used inside this instrument. Do not touch inside or you may receive an electric shock.
Do not remove the covers of main unit and display unit and do not touch internal parts or circuits while the instrument power is turned on. There is a hazard of fatal or serious injury due to electric shock.
(Chapter 4 Maintenance)
SAFETY - 4