1.2.7
Type II Stage Allowable Value
Frequency | X, Y, | |
10.0 Hz | 1.0 cm/s2 | max. |
50.0 Hz | 2.0 cm/s2 | max. |
60.0 Hz | 2.0 cm/s2 | max. |
Acceleration 4 cm/s2 (gal) is the same as amplitude 10 µm
The allowable values is the value at the prescribed image disturbance of 0.2 mm and at the X 100,000 in photograph.
NOTICE: 1. A sine wave should be used for vibration measurement.
If other than a sine wave, measurement should be made with each frequency component concentrated at a dominant frequency level.
2.For vibration at an extremely low frequency of less than 1 Hz, complete prevention is impossible with the
3.In a frequency region from 1 to 10 Hz, interpolation should be made through each allowable value point.
4.If floor vibration exceeds the allowable values, please consult Hitachi (floor vibration that may cause image trouble should be measured in advance).
5.The
1.2.7Power Line Noise and Electric Field Noise
Image troubles may be observed when a device as given in Table
In case an equipment energized by power of a frequency different from the commercial frequency employed on the Model
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