UIS2/UIS OBJECTIVE LENSES
■Meaning of abbreviations shown on objective lens
M P L (Plan) F L N - 1 0 0 B D
M: | Metallurgical (no cover) | PL: Plan/ | |
LM: | Long working distance | Corrects field | |
| metallurgical use | curvature of | |
SLM: Super long working | the periphery of | ||
the image plane | |||
| distance metallurgical use | ||
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LC: | Observation through |
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| substrate |
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None: Achromat/
Corrects aberration at 2 wavelengths of blue and red
FL: SemiApochromat/
Corrects chromatic aberration in the visible range (violet~red)
APO: Apochromat/
Optimally corrects chromatic aberration in the entire visible band (violet~red)
None: UIS | Number: | None: Brightfield | ||
N: | UIS2 | Objective lens | BD: | Brightfield/darkfield |
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| magnification | BDP: Brightfield/darkfield/ | |
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| polarizing |
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| IR: | IR |
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| LCD: | LCD |
■Objective lens notation
Magnification
Objective lenses series abbreviation (PL: Plan)
N.A. (Numerical Aperture)
For brightfield observation
Cover glass thickness (no cover) |
| Field Number |
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■Objective lens series list
| Series | Magnification | BF | DF | DIC*1 | POL | FL | F.N. (Field Number) | Remarks |
UIS2 | MPLFLN | 1.25/2.5 | \ |
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| 1.25x: 22 / 2.5x: 26.5 | Use together with polarizer and analyzer |
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| recommended |
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| 5/10/20/50/100 | \ |
| \U | \ | \*2 | 26.5 |
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| LMPLFLN | 5/10/20/50/100 | \ |
| \L | \ | \ | 26.5 |
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| MPLN | 5/10/20/50/100 | \ |
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| 22 |
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| 20/50/100 | \ |
| \L |
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| 26.5 | For LCD |
UIS | MPlanApo | 20/50/100 | \ |
| \*3 U | \ |
| 26.5 |
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| SLMPlan | 20/50 | \ |
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| 26.5 |
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| LMPlanIR/MPlanIR | 5/10/20/50/100 *4 | \ |
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| 22 | For |
UIS2 |
| 5/10/20/50/100/150 | \ | \ | \U | \ | \*2 | 26.5 |
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| 5/10/20/50/100 | \ | \ | aU | a | \*2 | 26.5 |
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| 5/10/20/50/100 | \ | \ | \L | \ | \ | 26.5 |
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| 5/10/20/50/100 | \ | \ |
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| 22 |
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UIS | 100 | \ | \ | \U | \ |
| 26.5 |
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*1 | DIC prism | |
*3 | 50x: DIC observation not applicable | *4 MPlanIR: available 100x only \: Responds a: Optimally responds BF: Brightfield DF: Darkfield |
DIC: Differential Interference Contrast | POL: Polarized light FL: Fluorescence |
■Features of objective lens series
a MPLFLN series: M Plan SemiApochromat — P 8
Plan SemiApochromat objective lenses, giving
a LMPLFLN series: Long WD M Plan SemiApochromat — P 9
Long working distance Plan SemiApochromat objective lenses, giving
a MPLN series: M Plan Achromat — P 10
Plan Achromat objective lenses providing excellent image flatness up to F.N. 22.
a LCPLFLN-LCD series: LCD Long WD M Plan SemiApochromat — P 11
Perfect objective lens series for observation of LCD panels and other samples through a glass substrate. Aberration correction matched to the glass thickness is accomplished using a correction ring.
a MPlanApo series: M Plan Apochromat — P 12
Highest class Plan Apochromat objective lenses that maximize performance in brightfield observation. All aberrations are corrected at the highest level, while providing high N.A.
a SLMPlan series: Super Long WD M Plan Achromat — P 12
Plan Achromat objective lenses with high magnification and super long working distance. Two magnifications, 20x and 50x are available. For 5x or 10x objective lenses, select from the LMPLFLN Series.
a
IR objective lenses which compensate for aberrations from visible to near infrared light. Ideal for the observations of semiconductor interiors and the back surface of a chip package as well as CSP bump inspection.
a MPLFLN-BD series: M Plan SemiApochromat BD — P 14
Plan SemiApochromat objective lenses, giving
a MPLFLN-BDP series: M Plan SemiApochromat BDP — P 15
Plan SemiApochromat objective lenses, giving
a LMPLFLN-BD series: Long WD M Plan SemiApochromat BD — P 16
Long working distance Plan SemiApochromat objective lenses, giving
a
Plan Achromat objective lenses providing excellent image flatness up to F.N. 22.
a MPlanApo BD: Plan Apochromat BD — P 18
Highest class Plan Apochromat objective lens that maximize performance in brightfield and darkfield observations. All aberrations are corrected at the highest level, while providing high N.A.
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