6.4.5.2 Display of SEM Image............................................................

6 -

82

6.4.5.3 Start of CD Measurement Function ........................................

6 -

83

6.4.5.4

Setting Measurement Parameters..........................................

6 -

84

6.4.5.5

Calibration..............................................................................

6 -

86

6.4.5.6

Measurement Operation.........................................................

6 -

91

6.4.5.7

Recording Measured Data .....................................................

6 - 101

APPENDIX

 

 

 

Message List .........................................................................................................

APPENDIX - 1

INDEX .............................................................................................................................

INDEX -1

Service Office Locations

 

 

 

- ix -