4.1.3

Maintenance for the Orifice Unit...............................................................

4 - 10

4.1.4

Maintenance for the Condenser Aperture ................................................

4 - 15

4.1.5

Cleaning of Aperture Plates .....................................................................

4 - 19

4.1.6

Ultrasonic Cleaning with Organic Solvent.................................................

4 - 20

4.1.7

Replacement of Scintillator.......................................................................

4 - 20

4.2 Maintenance of Rotary Pump ................................................................................

4 - 21

4.2.1

Oil Change...............................................................................................

4 - 21

4.2.2

Replacement of Oil Mist Trap Element.....................................................

4 - 21

4.3 Maintenance of Air Compressor.............................................................................

4 - 22

4.3.1

Checkup and Maintenance.......................................................................

4 - 22

4.3.2

Troubleshooting of Air Compressor..........................................................

4 - 24

4.3.3

Location and Functions of Major Components .........................................

4 - 25

4.4 Troubleshooting.....................................................................................................

4 - 26

4.4.1

The Evacuation System does not Run .....................................................

4 - 26

4.4.2

The Vacuum Level in the Specimen Chamber does not Rise...................

4 - 27

4.4.3

The Emission Current Fails to Flow Normally...........................................

4 - 27

4.4.4

When Image is not Shown on Screen ......................................................

4 - 28

4.4.5

When Image is Very Noisy.......................................................................

4 - 29

4.4.6

When You cannot Correct Astigmatism ...................................................

4 - 30

4.4.7

When Auto Focus or Auto Stigma does not Work Satisfactorily...............

4 - 31

4.4.8

When S-3400N Control Program does not Start Up.................................

4 - 31

4.4.9

When PC has Hung Up............................................................................

4 - 32

4.4.10

When Error Messages are Shown ...........................................................

4 - 32

4.5What to Do in the Event of a Power Outage or the System must be Shutdown

 

 

Completely for a Long Time...................................................................................

4 - 33

 

4.6

What to Do when the Power Failure and the System is to be Started Up ..............

4 - 33

 

4.7

Caution on Maintenance ........................................................................................

4 - 34

 

4.8

Electron Gun Beam Axis Maintenance...................................................................

4

- 34

 

 

4.8.1 Adjusting the Electron Gun Mounting Position (for service engineers) .....

4 - 34

5

REPLACEMENT PARTS................................................................................................

5 -

1

 

5.1

Consumables.........................................................................................................

5 -

1

 

5.2

Replacement Parts ................................................................................................

5 -

2

 

5.3

Spare Parts............................................................................................................

5 -

3

6

ACCESSORY OPERATION ...........................................................................................

6 -

1

 

6.1

Model S-5080 Auto-Camera (Option) ....................................................................

6 -

1

 

 

6.1.1

Configuration............................................................................................

6 -

1

 

 

6.1.2

Specifications...........................................................................................

6 -

3

 

 

6.1.3

Assembling the Camera...........................................................................

6 -

5

 

 

6.1.4

Operation .................................................................................................

6 -

6

 

6.2

Faraday Cup Device (Option) ................................................................................

6 -

8

 

 

6.2.1 Range of Type II Stage Drive...................................................................

6 -

8

 

 

6.1.2

Usage Method..........................................................................................

6 -

8

 

6.3

Specification of S-3400N External Communication (Option) ..................................

6 - 10

- vii -