6.3.1 About the External Communication of S-3400N .......................................

6 - 10

 

6.3.1.1

Communication Procedure.......................................................

6 - 10

 

6.3.1.2

Function and Limitation ............................................................

6 - 10

6.3.2

Each Command .......................................................................................

6 - 11

 

6.3.2.1

Initialize the Communication.....................................................

6 - 16

 

6.3.2.2

Acceleration Voltage ................................................................

6 - 17

 

6.3.2.3

Magnification............................................................................

6 - 20

 

6.3.2.4

Working Distance (WD) ...........................................................

6 - 21

 

6.3.2.5

Focus Value .............................................................................

6 - 22

 

6.3.2.6

Probe Current ..........................................................................

6 - 23

 

6.3.2.7

Auto Functions .........................................................................

6 - 24

 

6.3.2.8

Stage .......................................................................................

6 - 26

 

6.3.2.9

Vacuum Setting........................................................................

6 - 32

 

6.3.2.10

Multi-purpose Command ..........................................................

6 - 34

 

6.3.2.11

Machine Information.................................................................

6 - 34

6.3.3

Programming ...........................................................................................

6 - 35

 

6.3.3.1

Example of Program ................................................................

6 - 35

6.3.4External Communication Setting Procedure

 

(Setting of PC for S-3400N) .....................................................................

6 - 36

 

6.3.4.1

Preparation ..............................................................................

6 - 36

 

6.3.4.2

Component Registration...........................................................

6 - 36

 

6.3.4.3 Security and DCOM Settings....................................................

6 - 38

 

6.3.4.4 Setup of the External Communication Option...........................

6 - 55

6.4 CD Measurement Function (Option) ......................................................................

6 - 56

6.4.1

Outline .....................................................................................................

6 - 56

 

6.4.1.1

CD Measurement Function.......................................................

6 - 56

 

6.4.1.2 CD Measurement Function Options .........................................

6 - 56

6.4.2

Specifications...........................................................................................

6 - 57

 

6.4.2.1 Modes of CD Measurement......................................................

6 - 57

 

6.4.2.2 Display of Measured Result......................................................

6 - 57

 

6.4.2.3 Recording/Saving of Measured Result .....................................

6 - 57

 

6.4.2.4 CD Measurement Accuracy (Reproducibility) ...........................

6 - 57

6.4.3 Principle of CD Measurement ..................................................................

6 - 58

 

6.4.3.1 Edge Detection Algorithm in Auto Measurement ......................

6 - 58

 

6.4.3.2

Linear Approximation Method...................................................

6 - 60

 

6.4.3.3

Threshold Level Method...........................................................

6 - 63

 

6.4.3.4 Measurement Accuracy and Error Factors ...............................

6 - 64

6.4.4 Description of Windows Used in Measuring Operation.............................

6 - 69

 

6.4.4.1 Starting CD Measurement Function .........................................

6 - 69

 

6.4.4.2

Images for Measurement .........................................................

6 - 69

 

6.4.4.3

CD Measurement Window .......................................................

6 - 70

 

6.4.4.4

Measurement Condition Window..............................................

6 - 73

 

6.4.4.5

Calibration Window ..................................................................

6 - 80

6.4.5

Operation

.................................................................................................

6 - 82

 

6.4.5.1 Flow of Measuring Operation ...................................................

6 - 82

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