3.9.7

Pseudo Color Display.............................................................................

3 - 129

 

3.9.8

Data Entry Function ...............................................................................

3 - 130

 

3.9.9

Raster Rotation, Dynamic Focus and Tilt Compensation .......................

3 - 134

 

3.9.10

Printing Images Using Report Generation Function ...............................

3 - 136

 

3.9.11

Copy Image............................................................................................

3 - 143

 

3.9.12

Copy Image Information Text.................................................................

3 - 143

 

3. 9.13

Oblique Image........................................................................................

3 - 144

 

3.9.14

Optional Setting .....................................................................................

3 - 145

 

3.9.15

Password Setting ...................................................................................

3 - 150

 

3.9.16

Setting Login Name ...............................................................................

3 - 150

 

3.9.17

Restoring DB..........................................................................................

3 - 152

 

3.9.18

User Dependent Operation Condition Memory.......................................

3 - 153

 

3.9.19

Password Locking of Windows ..............................................................

3 - 154

 

3.9.20

Downloading Stage Control Program .....................................................

3 - 155

3.10

Image Quality ......................................................................................................

3 - 157

 

3.10.1

Accelerating Voltage and Image Quality ................................................

3 - 157

 

3.10.2

Probe Current Setting and Image Quality...............................................

3 - 158

 

3.10.3

Objective Lens Aperture and Image Quality...........................................

3 - 158

 

3.10.4

Influence of WD in Low-vacuum Mode...................................................

3 - 159

3.11

Using SEM Data Manager ...................................................................................

3 - 160

 

3.11.1

Precaution on SEM Data Manager.........................................................

3 - 160

 

3.11.2

Functions

...............................................................................................

3 - 161

 

 

3.11.2.1

Image Database.....................................................................

3 - 161

 

 

3.11.2.2

Menu and Tool Buttons ..........................................................

3 - 163

 

3.11.3

Operation

...............................................................................................

3 - 167

 

 

3.11.3.1

Registering Images on SEM Data Manager Database ...........

3 - 167

 

 

3.11.3.2

Selecting User Name and Opening Data Tree .......................

3 - 168

 

 

3.11.3.3

Image Display ........................................................................

3 - 169

 

 

3.11.3.4

Image Information ..................................................................

3 - 170

 

 

3.11.3.5

Viewer Display .......................................................................

3 - 170

 

 

3.11.3.6

Data Entry ..............................................................................

3 - 171

 

 

3.11.3.7

Contrast Conversion...............................................................

3 - 174

 

 

3.11.3.8

Image Processing ..................................................................

3 - 177

 

 

3.11.3.9

Color Mixing ...........................................................................

3 - 179

 

 

3.11.3.10

Printing Images ......................................................................

3 - 181

 

 

3.11.3.11

Image File Operation..............................................................

3 - 181

 

 

3.11.3.12

Batch Operation of Image Files..............................................

3 - 182

 

 

3.11.3.13

Slide Show .............................................................................

3 - 184

 

 

3.11.3.14

Optional Setting......................................................................

3 - 184

 

3.11.3.15 Optimizing and Repairing Database File ................................

3 - 186

4 MAINTENANCE..............................................................................................................

4 -

1

4.1 Maintenance of Electron Optical Column ...............................................................

4 -

1

4.1.1

Filament Exchange ..................................................................................

4 -

1

4.1.2

Maintenance for the Objective Lens Movable Aperture ............................

4 -

6

- vi -