| 3.9.7 | Pseudo Color Display............................................................................. | ||
| 3.9.8 | Data Entry Function ............................................................................... | ||
| 3.9.9 | Raster Rotation, Dynamic Focus and Tilt Compensation ....................... | ||
| 3.9.10 | Printing Images Using Report Generation Function ............................... | ||
| 3.9.11 | Copy Image............................................................................................ | ||
| 3.9.12 | Copy Image Information Text................................................................. | ||
| 3. 9.13 | Oblique Image........................................................................................ | ||
| 3.9.14 | Optional Setting ..................................................................................... | ||
| 3.9.15 | Password Setting ................................................................................... | ||
| 3.9.16 | Setting Login Name ............................................................................... | ||
| 3.9.17 | Restoring DB.......................................................................................... | ||
| 3.9.18 | User Dependent Operation Condition Memory....................................... | ||
| 3.9.19 | Password Locking of Windows .............................................................. | ||
| 3.9.20 | Downloading Stage Control Program ..................................................... | ||
3.10 | Image Quality ...................................................................................................... | |||
| 3.10.1 | Accelerating Voltage and Image Quality ................................................ | ||
| 3.10.2 | Probe Current Setting and Image Quality............................................... | ||
| 3.10.3 | Objective Lens Aperture and Image Quality........................................... | ||
| 3.10.4 | Influence of WD in | ||
3.11 | Using SEM Data Manager ................................................................................... | |||
| 3.11.1 | Precaution on SEM Data Manager......................................................... | ||
| 3.11.2 | Functions | ............................................................................................... | |
|
| 3.11.2.1 | Image Database..................................................................... | |
|
| 3.11.2.2 | Menu and Tool Buttons .......................................................... | |
| 3.11.3 | Operation | ............................................................................................... | |
|
| 3.11.3.1 | Registering Images on SEM Data Manager Database ........... | |
|
| 3.11.3.2 | Selecting User Name and Opening Data Tree ....................... | |
|
| 3.11.3.3 | Image Display ........................................................................ | |
|
| 3.11.3.4 | Image Information .................................................................. | |
|
| 3.11.3.5 | Viewer Display ....................................................................... | |
|
| 3.11.3.6 | Data Entry .............................................................................. | |
|
| 3.11.3.7 | Contrast Conversion............................................................... | |
|
| 3.11.3.8 | Image Processing .................................................................. | |
|
| 3.11.3.9 | Color Mixing ........................................................................... | |
|
| 3.11.3.10 | Printing Images ...................................................................... | |
|
| 3.11.3.11 | Image File Operation.............................................................. | |
|
| 3.11.3.12 | Batch Operation of Image Files.............................................. | |
|
| 3.11.3.13 | Slide Show ............................................................................. | |
|
| 3.11.3.14 | Optional Setting...................................................................... |
| 3.11.3.15 Optimizing and Repairing Database File ................................ | ||
4 MAINTENANCE.............................................................................................................. | |||
4.1 Maintenance of Electron Optical Column ............................................................... | |||
4.1.1 | Filament Exchange .................................................................................. | ||
4.1.2 | Maintenance for the Objective Lens Movable Aperture ............................ |
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