1)Unit ID 1: Indicates the equipment sending the signal. When supporting Set ID by the command 1, 4 bits of low ranks of Set ID are set up.

2)Unit ID 2: Indicates the equipment receiving the signal. When supporting Set ID by the command 1, 4 bits of higher ranks of Set ID are set up.

* Set ID : it is the apparatus number assigned to each plasma monitor.

Command 2

Command 2, along with command 1, is a number used to distinguish each command.

Check Sum (CKS), Error Processing, and ACK

1)The check sum described below and RS-232C no parity are used together for a check of the received data. The check sum is the lower order 8 bits of one frame of sent or received data comprising the sum total of Command 1, Unit ID 1 and 2, Command 2, Data Length, and Data.

Check Sum Example

DFH

80H

60H

47H

01H

01H

08H

Command1

Unit ID1

Unit ID2

Command2

Data Length

Data

Check Sum

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Total 208H

2) Error Processing

•When the communication interval is vacant for more than 4 ms, thereafter a

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