Setup & Operation 2. Specifications 14 G10 / G20 Rev.2
Cleanroom-model G10/G20-***C The following figure shows the additional parts and specifications for the Table Top mounting
Cleanroom-model when compared with the Standard-model in appearance.
Upper bellows
Plate cover
(For static electricity
countermeasure)
Cover
for Table Top mounting surface
Exhaust port
Lower bellows
Plate cover
(For static electricity
countermeasure)