Setup & Operation 2. Specifications 22 G10 / G20 Rev.2
Cleanroom-model G10/G20-***CR The following figure shows the additional parts and specifications for the Ceiling mounting Cleanroom-model
when compared with the Standard-model in appearance.
Upper bellows
Plate cover
(For static electricity
countermeasure)
Exhaust port
Lower bellows
Plate cover
(For static electricity
countermeasure)
Cover
for Ceiling mounting surface