2.3.7

2.3.7.3VACUUM MODE Window

This window can be used to switch vacuum modes and set a vacuum level.

Vacuum mode selection control

Vacuum level display area

Vacuum level setting control

Fig. 2.3-27 VACUUM MODE Window

(1)Vacuum mode selection control

This control switches between the VP-SEM and SEM modes.

If the VP-SEM mode is selected, the vacuum level is set to the level specified in the Setting Vacuum option in the block.

(2)Vacuum level display area

This area shows the current vacuum level in the specimen chamber in terms of an indicator and a numerical value.

(3)Vacuum level setting control

This control sets and displays the vacuum level that is specified in the VP-SEM mode. The allowable range of vacuum level is from 6 to 270Pa.

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