2.3.7

2.3.7.1ELECTRON BEAM Window

This block allows you to turn the accelerating voltage on and off, and to set the probe current.

Vacc selection box

Vacc micro adjustment button

Vacc ON/OFF button

Probe current selection box

Probe current micro adjustment button

Probe current setting slider

Fig. 2.3-25 Electron Beam Window

(1)Accelerating voltage selection box

To set an accelerating voltage, either enter a numerical value directly in this box or select a desired value from a list that is displayed by clicking a pull-down menu.

(2)Accelerating voltage micro-adjustment button

By clicking the Up and Down arrows, you can adjust the accelerating voltage in 0.1kV increments.

(3)Accelerating voltage ON/OFF button

This button turns the accelerating voltage on and off.

(4)Probe current selection box

You can set a probe current by either entering a numerical value directly in this box or selecting a desired value from a list that is displayed by clicking a pull-down button.

(5)Probe current micro-adjustment button

By clicking the Up and Down arrows, you can adjust the probe current in 0.1 increments.

(6)Probe current setting slider

By moving the slider to the right or left, you can vary the probe current. In addition, by clicking the side of the slider, you can adjust the probe current in 0.5 increments.

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