2.3Graphical User Interface (GUI)

2.3.7Operation Panel

The Operation Panel is comprised of four tabs. The Cond., Image, and Utility tabs relate to SEM operations. On each tab, control view/hide can be specified on a user-to-user basis. The Stage tab is for operating the stage. This tab is displayed when the available stage is a Type II stage (with a 5-axis motor drive).

The following explains the functions of the blocks that appear on the Cond., Image, and Utility tabs. The Stage tab will be explained in the section on Stage Operation (3.5.7).

Cond tab

Image tab

Utility tab

Fig. 2.3-24 Operation Panel

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