2.1.6

2.1.6Evacuation System

Figure 2.1-6 shows the block diagram of evacuating system.

 

S.E.C (OPTION)

 

 

GV

 

 

 

Pi-EX

V5

NV

 

Pi-2

V9

 

V4

 

 

 

V2

 

 

 

V8

 

V6

 

 

V1

 

 

Pi-1

 

 

 

V7

V10

TMP

V3

 

 

 

 

R.P 1 /

R.P 2(OPTION) /

VALVE 状態検知

(DRY POMP)

(DRY POMP)

 

 

 

Fig. 2.1-6 Evacuation System

TMP:

Turbo molecular pump for evacuating the specimen chamber

RP:

Rotary pump

V1-V7:

Vacuum valves

NV:

Needle valve

Pi.1:

Pirani vacuum gauge

Pi.2:

Pirani vacuum gauge

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