2.1Control Knobs and Switches on Main Unit

2.1.5EVAC Panel

Figure 2.1-5 shows the EVAC panel.

EVAC Switch/light

N-MODE Light

AIR Switch/light

Key Switch

PUMP Light

 

Fig. 2.1-5 EVAC Panel

• Key switch:

The POWER for the system unit. Insert the key and turn it to the START

 

position to start the system. Releasing the key stops the key at the ON

 

position. Returning the key to the OFF position shuts down the system in

 

a few seconds.

•EVAC switch/light: This switch introduces air into the specimen chamber. The built-in light comes on when the specimen chamber is at atmospheric pressure. When the air is being introduced, the light blinks. When held down for 0.5 second or longer, this switch acts as an AIR switch/light.

•

N-MODE light:

This light comes on when the VP-SEM mode is selected.

 

 

See <2.3.7.3 VACUUM MODE Window>.

•

PUMP light:

This light, which indicates the operating status of the turbo molecular

 

 

pump (TMP), blinks when the TMP is accelerating, and remains solidly lit

 

 

when the pump is running at a steady state.

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