2.1Control Knobs and Switches on Main Unit
2.1.3Specimen Stage (Type I)
Figure
[R] control
[T]control
[X]control
[Z] control
Fig.
•[X] control: Moves specimen in X direction within a range from 0 to 80 mm.
•[Y] control: Moves specimen in Y direction within a range from 0 to 40 mm.
Touch Sensor and
Absorbed Current
Terminal
[Y] control
•[Z] control: Moves specimen in Z direction or shifts WD (Working Distance) within a range from 5 to 35 mm.
•[R] control: Rotates specimen through 360° (continuously variable)
•[T] control: Tilts specimen within a range from
•[Touch sensor and absorbed electron measurement terminal]: This terminal is used for the measurement of the irradiation current of electrons on the specimen (normally it is used as a touch sensor).
Touch Sensor | : This observes whether the specimen or the stage come in contact |
| with components inside the specimen chamber |
| The sensor will inform with the buzzer and the message when |
coming in contact.
Absorbed Current Terminal : The absorbed current can be measured by removing the cable for the touch sensor, and connecting a minute ammeter instead.
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