2.1Control Knobs and Switches on Main Unit

2.1.3Specimen Stage (Type I)

Figure 2.1-3 shows the Type I specimen stage.

[R] control

[T]control

[X]control

[Z] control

Fig. 2.1-3 Specimen Stage (Type I)

[X] control: Moves specimen in X direction within a range from 0 to 80 mm.

[Y] control: Moves specimen in Y direction within a range from 0 to 40 mm.

Touch Sensor and

Absorbed Current

Terminal

[Y] control

[Z] control: Moves specimen in Z direction or shifts WD (Working Distance) within a range from 5 to 35 mm. (X-ray analysis position is at 15 mm working distance)

[R] control: Rotates specimen through 360° (continuously variable)

[T] control: Tilts specimen within a range from -20° to 90°.

[Touch sensor and absorbed electron measurement terminal]: This terminal is used for the measurement of the irradiation current of electrons on the specimen (normally it is used as a touch sensor).

Touch Sensor

: This observes whether the specimen or the stage come in contact

 

with components inside the specimen chamber

 

The sensor will inform with the buzzer and the message when

coming in contact.

Absorbed Current Terminal : The absorbed current can be measured by removing the cable for the touch sensor, and connecting a minute ammeter instead.

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