2.1.2

2.1.2Electron Optical Column

Figure 2.1-2 sketches the sectional view of the S-3400N column.

Electron Gun

1st Condenser Lens

Specimen Stage

BSE Detector

Pre-centered cartridge type

Tungsten hairpin filament

Beam Alignment coils

2nd Condenser Lens

Objective Lens Movable Aperture

Deflection Coil

Objective Lens

SE Detector

Specimen

Specimen Stab

Specimen

Chamber

Fig. 2.1-2 Sectional View of S-3400N Column

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