2.1.4

2.1.4Specimen Stage (Type II)

Figure 2.1-4 shows the appearance of specimen stage driven by motors (Type II).

Absorbed current measuring terminal (normally used as a touch sensor terminal)

Fig. 2.1-4 Large Specimen Stage (Type II)

•Range of movement in X direction: 0 to 100 mm

•Range of movement in Y direction: 0 to 50 mm

•Range of movement in Z direction: WD = 5 to 65 mm

(X-ray analysis position is at 10 mm working distance)

•Range of movement in R direction: 360° continuously

•Range of movement in T direction: -20° to 90°

•Touch sensor and absorbed current measurement terminal: This terminal is for the measurement of the absorbed current of the electron image of a specimen (normally it is used as a touch sensor terminal).

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