48.Failure Mode Request

Function

The external control equipment inquires the detection of failures of the plasma monitor.

Transmission Data

1FH 80H 60H 3FH 00H CKS

ACK

The plasma monitor returns the following ACK:

7FH 60H 80H 3FH 02H DATA00 DATA01 CKS

DATA00: FAILURE MODE 1 Bit 0 : PDP MODULE

0:Abnormal

1:Normal

Bit 1 : 1: fixed (backup)

Bit 2 : TEMPERATURE

0:Abnormal

1:Normal

Bit 3 : FAN

0:Abnormal

1:Normal

Bit 4 : TEMPERATURE SENSOR

0:Abnormal

1:Normal

Bit 5 : 1: fixed (backup)

Bit 6 : 1: fixed (backup)

Bit 7 : 1: fixed (backup)

DATA01: FAILURE MODE 2

Bit 0-7 : 1: fixed (backup)

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