Sierra Monitor Corporation dimensions Model 3200 Series Wet Bench Flame Detector

The various chemical vapors, acids and bases used in the semiconductor manufacturing wet benches pose a high potential for costly fires. Fires may result in costly damage to equipment, inventory and clean room facili- ties. Personnel injury and costly business interruptions are also likely. Factory Mutual requires electro-optical flame detectors in the semiconductor wet benches to monitor for fire. These flame detectors must be suit- able for the hostile chemicals used in the etching pro- cess (such as hydrofluoric, sulfuric, and hydrochloric acids). Furthermore, they must be tested and approved for fire response to FR polypropylene now used in the construction of wet benches as well as other fuels such as isopropyl alcohol.

The Model 3200 easily adapts to most standard fire extinguishing systems and wet bench systems. It uti- lizes relay output for alarm and trouble and does not require special controllers or wiring / junction boxes.

The Model 3200 Flame Detector uses proven, stable UV/IR technology to continuously monitor for flame in wet bench applications. Using state-of-the-art micro- processor controlled fire algorithms, the Model 3200 can recognize different types of flame signatures while

Model 3200 Series Wet Bench Flame Detector

rejecting common false alarms. Continuous self diag- nostics perform tests of the detector operation. Each flame detector is tested to respond to a 4-inch diam- eter isopropyl alcohol (IPA) fire at 10 feet with a 120o field of view.

The standard Model 3200 has a sealed polypropylene housing designed to an IEC 529 IP67 rating for pro- tection from a wide variety of acids and solvents. Thus occasional submersion by these chemicals will not dam- age the detector. The detector is rated over a wide operating temperature range for those applications where drying or heating elements are used. A version utilizing Polyvinylidene Fluoride (PVDF) is also avail- able.

Model 3200 Dimensions

Detector Response to Various Fuels

Fuels	Distance	Fire Size	Response Time
Polypropylene	8 ft.	4 in. dia.	Less than 3 sec.
Isopropyl Alcohol	10 ft.	4 in. dia.	Less than 3 sec.
Heptane	40 ft.	1 sq. ft.	Less than 3 sec.
MEK	15 ft.	4 in. dia.	Less than 3 sec.
Silane	30 ft.	18 in. jet	Less than 3 sec.
Hydrogen	15 ft.	18 in. jet	Less than 3 sec.

Field of View

Sierra Monitor Corp 1991 Tarob Court Milpitas, CA 95035 USA (408) 262-6611 (800) 727-4377 Fax: (408) 262-9042