Agilent Technologies 10737L manual Agilent 10737R THREE-AXIS Interferometer

Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

Interferometers

Special Considerations

AGILENT 10737R THREE-AXIS INTERFEROMETER

Axis No.2	Interferometer
	Input Face
Output
						14.38 mm
Input for				68.92		(0.566)
all axes				(2.71)		7.19 mm
Axis No.1					MP2	(0.283)		MP1
								See Note 1
Output			See Note 1
								7.19 mm
FROM								(0.283)
LASER
HEAD								Bottom of
								interferometer
								as shown in
Axis No.3		24.49 mm			10.11 mm		MP3	specification
Output			(0.964)		(0.39)		See	drawing
	17.3 mm		20.90 mm				Notes 1 & 2
	(0.68)				(0.83)

Laser Beam turns right

(viewed from top).

GENERAL NOTES:

1. For Each Axis:

Secondary Measurement beam

MP = Measurement Point

Darker Beam

Indicates

Primary Measurement beam

2. Drawing not to scale.

073						Mirror
1	7R
		3-				Measurement
10737R
		A
		X
			I
			S
					I
					N
					T
					E
					R
					F
					E
			E	F
		R
		O
	M
	E
R ET
From
Laser Head

Figure 7O-6B. Agilent 10737R Interferometer—beam patterns

User’s Manual 7O-11