Agilent Technologies 10737L Description, Figures 7O-1 through 7O-3 allow up to three measurements

Models: 10737L 10737R

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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

 

 

Interferometers

 

 

 

Description

 

 

 

 

 

 

 

Description

 

 

 

In this subchapter refers to either or both of the Agilent 10737L and

NOTE

 

 

Agilent 10737R interferometers.

 

 

 

The Agilent 10737L/R Compact Three-Axis interferometers (see

 

 

figures 7O-1 through 7O-3) allow up to three measurements

 

 

(displacement, pitch, and yaw) to be made on a single axis. The

 

 

Agilent 10737L and Agilent 10737R interferometers are identical

 

 

except that the “L” bends the measurement beams to the left and the

 

 

“R” bends the beams to the right, as viewed from the incoming beam

 

 

(see figures 7O-2 and 7O-3).

 

 

 

These interferometers are designed to use a 3 mm diameter laser

 

 

beam, available from an Agilent 5517C-003 Laser Head.

 

 

 

The measurement beam parallelism inherent in the design of the

 

 

Agilent 10737L/R interferometers ensures that there is essentially no

 

 

cosine error between their three measurements and also ensures angle

 

 

accuracy for pitch and yaw measurements.

 

 

 

These interferometers are designed for direct attachment of

 

 

Agilent 10780F-037 Remote Receiver’s fiber-optic sensor head (one per

 

 

axis). The Agilent 10780F-037 receiver is the same as the standard

 

 

receiver, except it does not include the lens assembly that attaches to

 

 

some Agilent interferometers; in this case, the required lens assembly

 

 

is part of the Agilent 10737L/R interferometer. This simplifies user

 

 

assembly, since no optical alignment of the receiver is required. The

 

 

fiber-optic cables from the receivers attach directly to the axis output

 

 

apertures on the input face of the interferometer. See figures 7O-2 and

 

 

7O-3.

 

 

 

The Agilent 10737L/R interferometers are based on the

 

 

 

Agilent 10706B High-Stability Plane Mirror Interferometer’s design.

 

 

Figure 7O-1 shows two views of an Agilent 10737L interferometer. In

 

 

addition to the Agilent 10706B components, the interferometer

 

 

includes the following assemblies:

 

 

 

• The receiver assembly. This can be removed during alignment

 

 

using the 4-40 socket-head cap screws. The 4-40 button-head

 

 

screws hold the 0.100-inch-thick cover plate and the receiver

 

 

assembly parts in place; do not try to loosen these screws or remove

 

 

the plate.

 

 

 

• The shear plate assembly. This assembly is factory-aligned and

 

 

must not be loosened or removed.

 

 

 

 

 

 

 

7O-2

User’s Manual

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Agilent Technologies 10737L, 10737R manual Description, Figures 7O-1 through 7O-3 allow up to three measurements