Chapter 7O Agilent 10737L and Agilent 10737R Compact
Interferometers
Description
MEASUREMENT PATH (fB)
Agilent 10737L and Agilent 10737R
Compact
fB
From | Axis #2 |
Laser |
|
| Axis #3 |
Axis #1 = fB±2∆ f1 | Axis #1 |
Axis #2 = fB±2∆ f2
Axis #3 = fB±2∆ f3
NOTE: Because the Measurement mirror may have a combination of displacement, pitch, and yaw motions, the Measurement Axes may have different Δf values, as shown
Reference
Mirror
λ/4 Plate
Measurement Mirror
REFERENCE PATH (fA)
Agilent 10737L and Agilent 10737R | Reference | |
Compact | ||
Mirror | ||
| ||
fA |
| |
From | Axis #2 | |
Laser |
| |
| Axis #3 | |
Axis #1 = fA | Axis #1 | |
Axis #2 = fA | ||
| ||
Axis #3 = fA | λ/4 Plate | |
|
Measurement
Mirror
COMPOSITE (fA) and (fB)
Agilent 10737L and Agilent 10737R
Compact
Reference
Mirror
fB
From
Laser
Axis #1 = fB±2∆ f1,fA
Axis #2 = fB±2∆ f2,fA
Axis #3 = fB±2∆ f3,fA
Axis #2
Axis #3 |
Axis #1 |
λ/4 Plate
Measurement
Mirror
LEGEND
= fA | = fB | = fA and fB |
=
Rounded corners are used to help you trace paths.
Figure 7O-5. Agilent 10737L/R Compact Three-Axis interferometers — beam paths
| User’s Manual |
