THE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL.
Hazard | Suggested Corrective Action |
Loss of utility: water and/or electricity | Provide sufficient backup water and power supply as neces- |
| sary to effect a safe shutdown under worst case conditions. |
Overpressure in foreline | Provide an interlock to ensure that the power supply to the |
| pump heater cannot be activated if the foreline pump is not run- |
| ning AND/OR pressure in foreline is above 0.5 Torr (66.5 Pa). |
Overtemperature
Insufficient water flow through the maincooling coils
Water trapped between inlet and outlet of
Fit temperature sensors and pump fluid level sensors with feedback to an interlock on the heater power supply.
Use water flow sensor and feedback to interlock the heater power supply.
Provide vent or pressure relief valves for both
Loss of ground integrity | Incorporate ground fault interrupt circuit into heater power |
| supply. |
Positive pressure in pumping system | Integrate pressure relief valve in vacuum system. |
High voltage | Prevent personnel contact with high voltages; design and |
| attach warnings. |
Toxicity/Corrosivity | Toxic and/or corrosive gases must be vented to a safe loca- |
| tion, ensuring adequate dilution or scrubbing to safe levels, |
| taking all action required to meet air quality standards. |
Explosion | Integrate pressure relief valves in all systems using pumps |
| 10 inches or larger in diameter. |
| Do not use or recommend the use of |
| pumping oils. |
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