2.3.6.2

Electron Gun Control Unit ........................................................

2 - 26

 

2.3.6.3

Scan Control Windows.............................................................

2 - 27

 

2.3.6.4

Auto Control .............................................................................

2 - 28

 

2.3.6.5

Magnification Control................................................................

2 - 30

 

2.3.6.6

Capture Control........................................................................

2 - 31

 

2.3.6.7

Image Recording Control .........................................................

2 - 33

 

2.3.6.8

EVAC/AIR Control....................................................................

2 - 35

 

2.3.6.9

Stage Control ...........................................................................

2 - 36

 

2.3.6.10

Extension for Dual Screen Mode..............................................

2 - 37

2.3.7

Operation Panel .......................................................................................

2 - 38

 

2.3.7.1

ELECTRON BEAM Window.....................................................

2 - 39

 

2.3.7.2

Focusing Position (WD) WORKING DISTANCE Window ........

2 - 40

 

2.3.7.3

VACUUM MODE Window ........................................................

2 - 41

 

2.3.7.4

SCAN MODE Window..............................................................

2 - 42

 

2.3.7.5

CONDITION LOAD/SAVE Window ..........................................

2 - 43

 

2.3.7.6

SCREEN MODE Window.........................................................

2 - 43

 

2.3.7.7

DETECTOR Window................................................................

2 - 44

 

2.3.7.8

IMAGE SHIFT Window ............................................................

2 - 44

 

2.3.7.9

R.ROTATION Window .............................................................

2 - 45

 

2.3.7.10

SIGNAL PROCESSING Window..............................................

2 - 46

 

2.3.7.11

DATA ENTRY Window.............................................................

2 - 47

 

2.3.7.12

TILT COMPENSATION Window ..............................................

2 - 47

 

2.3.7.13

Other........................................................................................

2 - 48

2.3.8 Mouse Operation on the Scanning Image ................................................

2 - 49

 

2.3.8.1

Exchanging Mouse Control Functions ......................................

2 - 49

 

2.3.8.2

Focus/Stigma/Contrast/Brightness Adjustment ........................

2 - 49

 

2.3.8.3

Stage and Image Shift Tools....................................................

2 - 51

2.3.9

Setup Dialog Window...............................................................................

2 - 52

 

2.3.9.1

Optics Tab................................................................................

2 - 53

 

2.3.9.2

Image Tab................................................................................

2 - 55

 

2.3.9.3

Record Tab ..............................................................................

2 - 56

 

2.3.9.4

OP. Cond Tab ..........................................................................

2 - 58

2.3.10

Captured Image Window..........................................................................

2 - 59

2.3.11 SEM Data Manager Window ....................................................................

2 - 61

2.3.12

Alignment Dialog Window ........................................................................

2 - 61

2.3.13 CD Measurement Dialog Window (option) ...............................................

2 - 62

2.3.14 Login Setting Dialog Window ...................................................................

2 - 62

2.3.15

Oblique Dialog Window............................................................................

2 - 63

2.3.16 Password Setting Dialog Window ............................................................

2 - 63

2.3.17 Save Image Dialog Window .....................................................................

2 - 64

2.3.18 Opt Signal Processing Dialog Window.....................................................

2 - 64

2.3.19

Split/Dual Mag Controller .........................................................................

2 - 65

2.3.20

Using Short-cut Keys ...............................................................................

2 - 65

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