6.If NG in the overall MO adjustments, return to Reset NV and perform the adjustment again.
LCD display
XXXNGXX
XXX:NG item No.
7.If OK through the overall MO adjustments, press x key to return to the TEST MODE and terminate the Overall Adjust- ment mode.
LCD display
XXX
5-4-3. Overall CD and MO adjustment items
1. Overall CD adjustment items
Item No. | Contents | |
|
| |
312 |
| |
313 | CD electrical offset adjustment | |
314 |
| |
|
| |
321 | CD TE gain adjustment | |
|
| |
328 | CD TWPP gain adjustment | |
|
| |
323 | CD TE offset adjustment | |
|
| |
336 | CD ABCD gain adjustment | |
|
| |
344 | CD focus gain adjustment | |
|
| |
345 | CD tracking gain adjustment | |
|
| |
521 | CD | |
522 | ||
| ||
|
| |
341 | CD focus bias adjustment | |
|
|
2. Overall MO adjustment items
Item No. | Contents | |
112 |
| |
113 | MO electrical offset adjustment | |
114 |
| |
|
| |
221 | Low reflective CD TE gain adjustment | |
|
| |
223 | Low reflective CD TE offset adjustment | |
|
| |
236 | Low reflective CD ABCD gain adjustment | |
|
| |
244 | Low reflective CD focus gain adjustment | |
|
| |
245 | Low reflective CD tracking gain adjustment | |
|
| |
121 | MO TE gain adjustment | |
|
| |
122 | MO TE offset adjustment | |
|
| |
144 | MO focus gain adjustment | |
|
| |
145 | MO tracking gain adjustment | |
|
| |
131 | MO TWPP offset adjustment | |
132 | ||
| ||
|
| |
136 | MO ABCD gain adjustment | |
|
| |
134 | MO TWPP gain adjustment | |
|
| |
141 | MO focus bias adjustment |
