0.12 µm line and space 14,400x

World-class resolution and precision.

World’s highest level of resolution

The optical system designed exclusively for use with 408-nm laser light (violet opt system) prevents the occurrence of aberrations associated with the use of a short-wavelength light source, and brings the highest performance out of the 408-nm light source. Such a high level of resolution has been made possible by the confocal optical system having an optimized circular pinhole and the high-

speed XY scanner with the MEMS technology of Olympus. With the world's highest-level planar resolution, a line or space of 0.12 µm can be resolved. Additionally, the 0.01 µm height resolution supports the user in undertaking measurements of microscopic surface profiles.

Basic concept of the two-dimensional scanner

Scan pattern

MEMS scanner

 

Incident light

Basic concept of a light path in the violet opt system

Photomultiplier

Circular confocal

pinhole

CCD

Laser

LED light

Objective lens

Further advanced, the world’s highest level of repeatability

Advanced optical techniques of Olympus accumulated over years have made possible the planar measurement repeatability of 3σ = 0.02 µm and the height measurement repeatability of 3σ = 0.04 + 0.002L mm (L = measured length in µm). A guide with high performance in terms of straightness and a high-precision linear scale are used for Z-axis scanning. These parts combined with the further advanced CFO search function contribute to very high level of repeatability. The high degree of reliability makes it possible for LEXT to meet the highly demanding needs of diverse fields of research and industry.

Intensity

Multiple points at peak intensity

Height

CFO search function

The original I-Z curve is drawn based on the upper, high-luminance points, and maximum luminance values are calculated with high accuracy by using an advanced formula. The high repeatability of LEXT is made possible through the height data being obtained in this process.

Measurements that can be trusted

Highly reliable data can be provided based on the strict traceability system that is linked with the JCSS (Japan Calibration Service System).

Traceability chart

Japan (NMIJ/AIST)

JCSS Japan Calibration Service System

 

 

OLYMPUS

 

 

 

 

 

 

Stabilized He-Ne Laser

 

Block Gauge

 

 

 

 

 

 

Calibration standard

 

Calibration block

 

 

 

LEXT (OLS3100)

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Olympus OLS3100 manual World-class resolution and precision, World’s highest level of resolution

OLS3100 specifications

The Olympus OLS3100 is a state-of-the-art laser scanning microscope designed for advanced surface and 3D measurements. It seamlessly combines precision optics with cutting-edge technology, making it suitable for a wide range of applications in materials science, life sciences, and electronics.

One of the most notable features of the OLS3100 is its high-resolution imaging capability. Equipped with a robust optical system and advanced laser sources, it enables users to obtain detailed surface and topographical information at nanometer resolution. The microscope employs laser scanning technology that provides rapid data acquisition while minimizing sample damage, which is particularly advantageous when working with delicate specimens.

The OLS3100 also boasts an innovative multi-functional imaging mode. Users can switch between various imaging techniques, such as brightfield, darkfield, and fluorescence, enhancing versatility for different research needs. This multifunctionality allows researchers to study samples from different perspectives, enabling deeper insights into structural and compositional properties.

Furthermore, the OLS3100 features advanced software that facilitates easy data analysis and visualization. This software integrates powerful algorithms for surface measurement and metrology, allowing for efficient processing of complex datasets. Users can create 3D reconstructions of the sample surface, conduct roughness analysis, and generate detailed reports effortlessly.

The instrument is designed for user-friendly operation, featuring an intuitive interface and customizable workflows. This enables researchers, regardless of their experience level, to operate the system effectively. The OLS3100 also supports remote access capabilities, making it an ideal choice for collaborative projects where multiple users may need to access and analyze data from different locations.

In terms of durability, the OLS3100 is built with high-quality materials that ensure long-term reliability. The robust construction minimizes vibrations and other environmental interferences, resulting in consistent performance over time.

In conclusion, the Olympus OLS3100 is a versatile and powerful tool that combines high-resolution imaging, multifunctional capabilities, and user-friendly software for comprehensive surface analysis. This advanced laser scanning microscope is an excellent choice for researchers looking to advance their work in various scientific fields while ensuring precision, efficiency, and reliability. Its innovative features make it a valuable asset in any laboratory, pushing the boundaries of what is possible in microscopy today.