Olympus OLS3100 manual World-class resolution and precision, World’s highest level of resolution

0.12 µm line and space 14,400x

World-class resolution and precision.

●World’s highest level of resolution

The optical system designed exclusively for use with 408-nm laser light (violet opt system) prevents the occurrence of aberrations associated with the use of a short-wavelength light source, and brings the highest performance out of the 408-nm light source. Such a high level of resolution has been made possible by the confocal optical system having an optimized circular pinhole and the high-

speed XY scanner with the MEMS technology of Olympus. With the world's highest-level planar resolution, a line or space of 0.12 µm can be resolved. Additionally, the 0.01 µm height resolution supports the user in undertaking measurements of microscopic surface profiles.

Basic concept of the two-dimensional scanner

Scan pattern MEMS scanner

Incident light

Basic concept of a light path in the violet opt system

Photomultiplier

Circular confocal

pinhole

CCD

Laser

LED light

Objective lens

●Further advanced, the world’s highest level of repeatability

Advanced optical techniques of Olympus accumulated over years have made possible the planar measurement repeatability of 3σ = 0.02 µm and the height measurement repeatability of 3σ = 0.04 + 0.002L mm (L = measured length in µm). A guide with high performance in terms of straightness and a high-precision linear scale are used for Z-axis scanning. These parts combined with the further advanced CFO search function contribute to very high level of repeatability. The high degree of reliability makes it possible for LEXT to meet the highly demanding needs of diverse fields of research and industry.

Intensity

Multiple points at peak intensity

Height

CFO search function

The original I-Z curve is drawn based on the upper, high-luminance points, and maximum luminance values are calculated with high accuracy by using an advanced formula. The high repeatability of LEXT is made possible through the height data being obtained in this process.

●Measurements that can be trusted

Highly reliable data can be provided based on the strict traceability system that is linked with the JCSS (Japan Calibration Service System).

Traceability chart

Japan (NMIJ/AIST)

JCSS Japan Calibration Service System

	OLYMPUS
Stabilized He-Ne Laser	Block Gauge
Calibration standard	Calibration block

LEXT (OLS3100)

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