-32-

Optical Parts Disassembly

Condenser lens (OUT) assy
5. PBS and Integrators removal
Integrator lens-in
Integrator lens assy
(M2.5x8)

Fig.4

* Rugged surface fac-
ing to the PBS.
Integrator lens (OUT)
* Rugged surface
facing to the PBS
(M2.5x6)x2
Light mask
PBS
Integrator lens-in
shield
Marker
4. Condenser lens (OUT) removal
Cutting edge
comes to this
side.
Prism beam
splitter (PBS)

Fig.5

Condenser lens (OUT)
(M2.5x6)