5.3Field of view cleanness
Zone by | Maximum diameter of defects | Permitted total | |||
diameter, |
|
|
| area of defects, | |
Neglected | Permitted | ||||
mm | 2 | ||||
|
|
| mm | ||
|
| ∅, mm | Qty |
| |
|
|
|
|
| |
0 – 9.0 | 0.06 | 0.12 | 1 | 0.10 | |
|
|
|
|
| |
9.0 - 14.4 | 0.08 | 0.18 | 2 | 0.20 | |
|
|
|
|
| |
14.4 | 0.10 | 0.20 | 2 | 0.35 | |
|
|
|
|
|
10