Table of Contents
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| Page |
Section 1 | Cautions on Safety | 5 | |
Section 2 | Clean Robot Basic specifications | 6 | |
2.1 | Basic Robot Specifications | 6 | |
2.2 | Outer Dimensions | 7 | |
2.3 | Operating Range and Coordinate System | 9 | |
2.4 | Tool Wiring and Piping | 10 | |
| 2.4.1 | Tool Wiring | 10 |
| 2.4.2 | Tool Air Piping | 10 |
Section 3 | Measure against Dust | 11 | |
3.1 | Specific Measures | 11 | |
3.2 | Scavenging Piping in the Robot | 12 | |
3.3 | Sealing Robot Cover | 13 | |
Section 4 | Maintenance and Inspection | 14 | |
4.1 | Maintenance and Inspection Items | 14 | |
4.2 | Lubricating Tool Shaft and Tool Shaft Support Bearing | 14 | |
4.3 | Replacement Parts List for Maintenance of Robot Mechanism.... | 15 | |
STE 58792
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