Section 2 Clean Robot Basic Specifications
2.1Basic Robot Specifications
Table 2.1 shows the basic specifications of the clean robot.
Table 2.1 Basic robot specifications
| Model | |||
Arm length |
| Full length | 650 mm | 1,050 mm |
|
| Arm 1 | 350 mm | 580 mm |
|
| Arm 2 | 300 mm | 470 mm |
Operating range |
| Axis 1 | ±115° | ±115° |
|
| Axis 2 | ±140° | ±145° |
|
| Axis 3 (vertical) | 185 mm | 185 mm |
|
| Axis 4 (wrist rotation) | ±280° | ±360° |
Maximum speed |
| Axis 1 | 255°/s | 170°/s |
|
| Axis 2 | 360°/s | 270°/s |
|
| Axis 3 (vertical) | 800 mm/s | 800 mm/s |
|
| Axis 4 (wrist rotation) | 864°/s | 576°/s |
|
| Composite | 4.77 m/s | 5.33 m/s |
Load |
| Mass of workpiece to | 5 kgf (rated) | 10 kgf (rated) |
|
| be carried | (Max. 10 kgf) | (Max. 20 kgf) |
|
| Permissible inertia | 0.0663 kgf·m2 | 0.1 kgf·m2 |
|
| moment at the tip |
|
|
Repeatability |
| X, Y (plane) | ±0.02 mm | ±0.03 mm |
|
| Axis 3 (vertical) | ±0.01 mm | ±0.02 mm |
|
| Axis 4 (wrist rotation) | ±0.03° | ±0.03° |
Tool wiring and air piping | 12 cables and 2 pipelines | |||
Degree of cleanliness | Designed for cleanliness 10 (¿ Note 1) | |||
Drive system |
|
| AC servo motor | |
Mass of the basic body | 65 kgf | 95 kgf | ||
Robot controller |
|
| SR7000 | |
Note 1: Cleanliness 10:
When this robot is operated in the clean bench (cleanliness 1 or less) installed in the downflow clean room, the number of fine particles of 0.3 µm or over contained in 1 ft3 as measured in the plane of the lower end position of axis 3 stroke is ten (10) or less.
Air speed of downflow is 0.3 ~ 0.5 m/s.
STE 58792
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