coefficient, place the HPM-2002-OBE in the Cal mode using the SELECT button. Then turn the ADJUST rotary encoder. The Cal light will begin to flash during adjustment and will continue to flash until the Cal mode is exited using the SELECT button.
To perform a full calibration on the HPM-2002-OBE, first use the Zero Coefficient Adjustment Procedure. Followed by the Midrange Coefficient Adjustment Procedure, and finally perform the Atmosphere Coefficient Adjustment Procedure. Sensor Coefficients are stored in the Sensor’s EEPROM upon exiting the Cal mode.
3.1.5.GAS Mode
The HPM-2002-OBE can provide true pressure measurements in many gas environments. At pressure levels where the direct force piezoresistive sensor is operative, the instrument is gas composition independent and measures the true pressure regardless of gas composition. The Pirani is gas composition sensitive so the actual composition must be known and the Pirani calibrated in that gas. When the vacuum system’s gas composition is dominated by a single gas species (for example, during system venting with an inert gas), the user can enter a gas selection into the HPM-2002-OBE by rotating the ADJUST rotary encoder. To view the gas selection, depress the SELECT button until the GAS light is illuminated. The number on the display corresponds to the gas. See the table below.
Gas Selection Table
Gas Mode | Gas |
Displayed Number | |
| |
00 | Nitrogen |
| |
01 | Argon |
| |
02 | Helium |
| |
03 | Water Vapor |
| |
04 | Custom |
| |
3.1.6.Analog Output (0-10V)
The dual (0 - 10V) output option board provides voltage outputs proportional to the HPM-2002-OBE’s pressure reading. The first channel (pin 5) corresponds to the higher-pressure range (0 - 1024 Torr). The second channel (pin 7) corresponds to the lower pressure range (0 - 1000 mTorr). The equation below gives the output voltage on the pressure:
V (channel1) = pressure 100
V (channel 2) = 10 × pressure
Where V(channel 1) is the voltage between pins 5 and 6, V(channel 2) is the voltage between pins 7 and 6, and the pressure is indicated in Torr.
HPM-2002-OBEVacuum Gauge | Page 11 of 39 |