Teledyne instruction manual Section, General Information, Features, Model 2002 Sensors

SECTION 1

General Information

The Model 2002 is a wide range vacuum measuring instrument consisting of a digital microproces- sor-based display unit, a miniature, rugged, thin film based sensing element that measures from below 1x10-4up to 100 Torr, a piezoresistive sensor that measures from 1 to 1000 Torr, EEPROM (Electrically Erasable/Programmable Read Only Memory), and an interconnecting cable. Together, these components provide accurate vacuum measurement over 7 decades of vacuum from 1x10-4to 1000 Torr. This instrument is a new design approach based on over 50 years of experience by Hastings Instruments with well-known and widely used thermal conduc- tion vacuum measurement techniques. The Model 2002 is designed for quick, easy installation and will provide the user with long lasting, trouble free, accurate vacuum measurement.

1.1Features

•Wide dynamic range: 1x10-4to 1000 Torr

•Compact rugged design

•Attitude insensitive

•Fast dynamic response

•Withstands 150 psig positive pressure

•Linear per decade

•Bakeable to 2500C

•TTL output process control

•Interchangeable transducer

•Corrosion resistant

1.2Model 2002 Sensors

The Model 2002 transducer is comprised of an ion implanted, piezoresistive, direct force sensor and a thin film Pirani type sensor. The Pirani sensing element is a Pt thin film serpentine element (see Figure 5.3a) deposited on a 1 micron thick Si3N4 membrane. The membrane is peripherally supported by a Si box shaped die and is covered by a thick Si lid parallel to the membrane and open on two ends (see Figure 5.3b). The piezoresistive unit is an ion implanted Wheatstone bridge in a 50 micron thick Si membrane peripherally supported by a Si box shaped die which has been anodically bonded to a Pyrex substrate.

The dual sensor assembly is encased in a corrosion resistant 316 stainless steel tube shell. The durable tube design withstands high pressure (150 psig/10.2 bar) and high pressure surges. Since the Pirani sensor is miniaturized and employs a Pt thin film on a Si3N4 membrane (instead of a conventional long fragile wire), the transducer can withstand high levels of mechanical shock.

The Model 2002 is designed for fast response. The micromachined sensing elements have a very small mass and operate in a constant temperature (Pirani) and a constant current (piezo) feed- back mode. This makes response time very fast as compared to other commercially available sensors which have to change the temperature of a significant mass to reflect pressure changes and have a large internal volume which must equalize in pressure with the system before the sensor can reach its final value. The transducer’s small internal volume (<1.5cc) permits rapid pneumatic response to system pressure changes. Further, the small geometry of the transducer prevents thermal convection currents which allows the sensor to be mounted in any orientation without calibration shifts.

Model 2002 page 5