SECTION 1

General Information

The Model 2002 is a wide range vacuum measuring instrument consisting of a digital microproces- sor-based display unit, a miniature, rugged, thin film based sensing element that measures from below 1x10-4up to 100 Torr, a piezoresistive sensor that measures from 1 to 1000 Torr, EEPROM (Electrically Erasable/Programmable Read Only Memory), and an interconnecting cable. Together, these components provide accurate vacuum measurement over 7 decades of vacuum from 1x10-4to 1000 Torr. This instrument is a new design approach based on over 50 years of experience by Hastings Instruments with well-known and widely used thermal conduc- tion vacuum measurement techniques. The Model 2002 is designed for quick, easy installation and will provide the user with long lasting, trouble free, accurate vacuum measurement.

1.1Features

•Wide dynamic range: 1x10-4to 1000 Torr

•Compact rugged design

•Attitude insensitive

•Fast dynamic response

•Withstands 150 psig positive pressure

•Linear per decade

•Bakeable to 2500C

•TTL output process control

•Interchangeable transducer

•Corrosion resistant

1.2Model 2002 Sensors

The Model 2002 transducer is comprised of an ion implanted, piezoresistive, direct force sensor and a thin film Pirani type sensor. The Pirani sensing element is a Pt thin film serpentine element (see Figure 5.3a) deposited on a 1 micron thick Si3N4 membrane. The membrane is peripherally supported by a Si box shaped die and is covered by a thick Si lid parallel to the membrane and open on two ends (see Figure 5.3b). The piezoresistive unit is an ion implanted Wheatstone bridge in a 50 micron thick Si membrane peripherally supported by a Si box shaped die which has been anodically bonded to a Pyrex substrate.

The dual sensor assembly is encased in a corrosion resistant 316 stainless steel tube shell. The durable tube design withstands high pressure (150 psig/10.2 bar) and high pressure surges. Since the Pirani sensor is miniaturized and employs a Pt thin film on a Si3N4 membrane (instead of a conventional long fragile wire), the transducer can withstand high levels of mechanical shock.

The Model 2002 is designed for fast response. The micromachined sensing elements have a very small mass and operate in a constant temperature (Pirani) and a constant current (piezo) feed- back mode. This makes response time very fast as compared to other commercially available sensors which have to change the temperature of a significant mass to reflect pressure changes and have a large internal volume which must equalize in pressure with the system before the sensor can reach its final value. The transducer’s small internal volume (<1.5cc) permits rapid pneumatic response to system pressure changes. Further, the small geometry of the transducer prevents thermal convection currents which allows the sensor to be mounted in any orientation without calibration shifts.

Model 2002 page 5

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Teledyne instruction manual General Information, Features, Model 2002 Sensors
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2002 specifications

Teledyne 2002 represents a significant advancement in the realm of sophisticated instrumentation and systems used across various industries. This innovative platform emerged as a versatile solution for a multitude of applications including environmental monitoring, industrial automation, and scientific research.

One of the most notable features of the Teledyne 2002 is its robust data analysis capability. Equipped with powerful processing units, it allows users to conduct real-time data analysis, ensuring accurate and timely results. This is particularly beneficial in fields where immediate decision-making is crucial, such as environmental assessments and industrial quality control.

The technology behind the Teledyne 2002 encompasses a variety of sensors and analytical instruments. Its modular design enables users to customize the system according to their specific needs, integrating various sensors such as gas analyzers, spectrometers, and temperature sensors. This flexibility makes the Teledyne 2002 applicable in diverse settings, from laboratory environments to rugged field conditions.

Another characteristic of the Teledyne 2002 is its user-friendly interface. The system is designed with an intuitive control panel and advanced software that provides comprehensive data visualization. This ease of use enhances productivity, allowing operators to facilitate complex analyses without extensive training.

Security and data integrity are also focal points of the Teledyne 2002. The system implements state-of-the-art encryption protocols to protect sensitive data. Moreover, it maintains compliance with industry standards, ensuring that the collected data is reliable and trustworthy.

In addition to its technological features, the Teledyne 2002 is built with durability in mind. The rugged construction allows it to withstand harsh environmental conditions, making it ideal for outdoor applications. Its compact design enables easy transportation, which is essential for fieldwork.

Moreover, the Teledyne 2002 includes connectivity options that facilitate seamless integration with existing systems. It can connect to cloud services, enabling remote monitoring and data storage. This feature not only enhances the functionality of the device but also allows for collaborative data sharing among teams.

Overall, the Teledyne 2002 symbolizes a convergence of advanced technology, user-centric design, and robust performance. With its extensive features and versatility, it stands out as a premier solution for professionals demanding precision and reliability in their analytical endeavors. Whether for environmental monitoring or industrial applications, the Teledyne 2002 is equipped to meet the challenges of modern data analysis.
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