![1. General Information](/images/new-backgrounds/159967/1599679x1.webp)
1. General Information
The Hastings
The
1.1.Features:
•
•Wide Dynamic Range
•Combined Sensors in a Single Tube
•Input Voltage
•Connector:
•Optional
•Optional Outputs (Dual
1.2.Model 2002 Sensors
The Model 2002 transducer tube is comprised of an ion implanted piezoresistive, direct force sensor and a thin film Pirani type sensor. The Pirani sensing element is a Pt thin film serpentine element deposited on a 1 micron thick Si3N4 membrane. The membrane is peripherally supported by a Si box shaped die and is covered by a thick Si lid parallel to the membrane and open on two ends. The piezoresistive unit is an ion implanted Wheatstone bridge in a 50 micron thick Si membrane peripherally supported by a Si box shaped die which has been anodically bonded to a Pyrex substrate.
The dual sensor assembly is encased in a corrosion resistant 316 stainless steel tube shell. The durable tube design withstands high pressure (150 psig/10.2 bar) and high pressure surges. Since the Pirani sensor is miniaturized and employs a Pt thin film on a Si3N4 membrane (instead of a conventional long fragile wire), the transducer can withstand high levels of mechanical shock.
The Model 2002 is designed for fast response. The micro machined sensing elements have a very small
mass and operate in a constant temperature (Pirani) and a constant current (piezo) feedback mode. This makes response time very fast as compared to other commercially available sensors which have to change the temperature of a significant mass to reflect pressure changes and have a large internal volume which must equalize in pressure with the system before the sensor can reach its final value. The transducer’s small internal volume (<1.5 cc) permits rapid pneumatic response to system pressure changes. Further, the small geometry of the transducer prevents thermal convection currents which allows the sensor to be mounted in any orientation without calibration shifts.
1.3. HPM-2002-OBE Analog Output Module
The analog output
1.4. HPM-2002-OBE Analog Output (4-20mA) Module
(Identical to 1.3, except replace
Page 5 of 39 |