Conditioned Power Center
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Section 7 - Options
7.7 SEMI S2-0200 Certification For use in semiconductor fabrication applications, the manufacturer offers a version of the power conditioner that
incorporates special modifications of the basic product family that are required for the power conditioner to meet
the safety requirements of the Semiconductor Equipment and Materials International (SEMI) safety standard S2-
0200. Included in the additional requirements for SEMI S2-0200 certification are provisions for special labeling,
an approved EMO (emergency machine off) circuit, input power conductor restraints (for additional safety in seis-
mically active locations), and product documentation that meets or exceeds the criteria specified in SEMI S2-
0200. Compliant documentation and labeling are provided with every product. Choosing the SEMI S2-0200
option adds the following additional features:
SEMI S2-0200 guidelines recognize that the power conditioner, when used in semiconductor operations, may
be installed in geographic areas that experience frequent (sometimes violent) seismic activity. The seismic an-
chorage option described in paragraph 7.6 is designed to limit horizontal and vertical movement of the power
conditioner, and since the product may be installed in seismically active locations for non-semiconductor applica-
tions, the anchorage kit is provided as a separate option. For full compliance with SEMI S2-0200, however,
SEMI requires that the input power conductors also be provided with a restraint system to prevent their detach-
ment from the input circuit breaker up to the limits of movement provided by the anchorage kits. When ordered
with the SEMI S2-0200 certification option, the power conditioner will be fitted with a steel bracket installed inside
the power conditioner enclosure running horizontally from side to side and near the top of the enclosure. At-
tached to this steel bracket is a plastic bag containing additional hardware for clamping the input power conduc-
tors to the steel restraint bracket. Once the input power conductors have been attached to the input circuit
breaker, the clamping hardware should be installed.
Take care not to severely over-tighten the clamping hardware to the extent that
the input power conductors are greatly distorted or the conductor insulation is
damaged in any way. Doing so may lead to conductor failure or short circuit,
which is not covered by the product warranty.
The EMO (emergency machine off) circuit provided with the SEMI S2-0200 option is considerably different from
the standard EMO design due to the incorporation of additional components designed to increase personnel
safety. For a complete details on the design of the SEMI-S2-0200 EMO circuit, please consult the schematics
on pages 34 (general system schematic), 35 (standard EMO circuit, and 36 (SEMI S2-0200 EMO) found in this
product manual. The standard EMO circuit operates as a normally open (N.O.) circuit that, when