To insure temperature invariance,

dVo

 

SdV

 

VdS

 

 

 

 

 

 

 

 

= P

 

+

 

 

 

 

 

 

 

dT

dT

 

dT

 

 

 

 

 

 

 

 

 

 

 

 

 

 

dVo

 

 

 

 

 

 

1 dV

1

 

dS

 

 

 

 

= 0

Therefore

 

 

 

 

= −⎜

 

+

 

 

dT

 

V dT

S

 

 

 

 

 

dT

This requires for any change in sensitivity to be countered by an equal but opposite change in applied voltage. The temperature compensation is a network of temperature dependent resistive components and fixed temperature compensation current source compensation, TCR = -TCS.

Sensitivity of the sensor is proportional to the sensor factor (K), the strain gauge positioning of the diaphragm (f) and the diaphragm geometry (q) thus SμKfq. Once the defining geometry of the resistive film and piezo membrane have been established, the sensor factor is dependent on the crystal orientation of the membrane material, the doping level and diffusion parameters and the strain gauge geometry. The sensor factor is essentially the change in resistance for a change in strain or,

Boron ion implanted doped Si matrix resistance elements are employed as shown in figure 5.2.

ΔR

K = ΔRL

L

The die is electro statically bonded on to a Pyrex substrate in a good vacuum so that the die cavity is evacuated; this provides maximum deflection at atmospheric pressure. When the sensor is exposed to vacuum the deflection becomes less and less as the die cavity pressure and the vacuum system pressure equalizes. Eventually the strain in the membrane due to DP becomes zero and only the residual strain in the lattice remains. The bridge resistive elements are oriented to give maximum change in bridge resistance which in turn gives maximum voltage out for a given strain.

149-072011 Model 2002 Vacuum Gauge

Page 19 of 38

Page 19
Image 19
Teledyne 2002 instruction manual = Δrl

2002 specifications

Teledyne 2002 represents a significant advancement in the realm of sophisticated instrumentation and systems used across various industries. This innovative platform emerged as a versatile solution for a multitude of applications including environmental monitoring, industrial automation, and scientific research.

One of the most notable features of the Teledyne 2002 is its robust data analysis capability. Equipped with powerful processing units, it allows users to conduct real-time data analysis, ensuring accurate and timely results. This is particularly beneficial in fields where immediate decision-making is crucial, such as environmental assessments and industrial quality control.

The technology behind the Teledyne 2002 encompasses a variety of sensors and analytical instruments. Its modular design enables users to customize the system according to their specific needs, integrating various sensors such as gas analyzers, spectrometers, and temperature sensors. This flexibility makes the Teledyne 2002 applicable in diverse settings, from laboratory environments to rugged field conditions.

Another characteristic of the Teledyne 2002 is its user-friendly interface. The system is designed with an intuitive control panel and advanced software that provides comprehensive data visualization. This ease of use enhances productivity, allowing operators to facilitate complex analyses without extensive training.

Security and data integrity are also focal points of the Teledyne 2002. The system implements state-of-the-art encryption protocols to protect sensitive data. Moreover, it maintains compliance with industry standards, ensuring that the collected data is reliable and trustworthy.

In addition to its technological features, the Teledyne 2002 is built with durability in mind. The rugged construction allows it to withstand harsh environmental conditions, making it ideal for outdoor applications. Its compact design enables easy transportation, which is essential for fieldwork.

Moreover, the Teledyne 2002 includes connectivity options that facilitate seamless integration with existing systems. It can connect to cloud services, enabling remote monitoring and data storage. This feature not only enhances the functionality of the device but also allows for collaborative data sharing among teams.

Overall, the Teledyne 2002 symbolizes a convergence of advanced technology, user-centric design, and robust performance. With its extensive features and versatility, it stands out as a premier solution for professionals demanding precision and reliability in their analytical endeavors. Whether for environmental monitoring or industrial applications, the Teledyne 2002 is equipped to meet the challenges of modern data analysis.