ETA Systems SM5505 manual Semi S2-0200 Certification, Input Power Conductor Restraints

Page 28

Section 7 - Options

7.7 SEMI S2-0200 Certification

For use in semiconductor fabrication applications, the manufacturer offers a version of the power conditioner that incorporates special modifications of the basic product family that are required for the power conditioner to meet the safety requirements of the Semiconductor Equipment and Materials International (SEMI) safety standard S2- 0200. Included in the additional requirements for SEMI S2-0200 certification are provisions for special labeling, an approved EMO (emergency machine off) circuit, input power conductor restraints (for additional safety in seis- mically active locations), and product documentation that meets or exceeds the criteria specified in SEMI S2- 0200. Compliant documentation and labeling are provided with every product. Choosing the SEMI S2-0200 option adds the following additional features:

7.7.1 Input Power Conductor Restraints

SEMI S2-0200 guidelines recognize that the power conditioner, when used in semiconductor operations, may be installed in geographic areas that experience frequent (sometimes violent) seismic activity. The seismic an- chorage option described in paragraph 7.6 is designed to limit horizontal and vertical movement of the power conditioner, and since the product may be installed in seismically active locations for non-semiconductor applica- tions, the anchorage kit is provided as a separate option. For full compliance with SEMI S2-0200, however, SEMI requires that the input power conductors also be provided with a restraint system to prevent their detach- ment from the input circuit breaker up to the limits of movement provided by the anchorage kits. When ordered with the SEMI S2-0200 certification option, the power conditioner will be fitted with a steel bracket installed inside the power conditioner enclosure running horizontally from side to side and near the top of the enclosure. At- tached to this steel bracket is a plastic bag containing additional hardware for clamping the input power conduc- tors to the steel restraint bracket. Once the input power conductors have been attached to the input circuit breaker, the clamping hardware should be installed.

Take care not to severely over-tighten the clamping hardware to the extent that

the input power conductors are greatly distorted or the conductor insulation is damaged in any way. Doing so may lead to conductor failure or short circuit,

which is not covered by the product warranty.

7.7.2 SEMI S2-0200 Compliant EMO

The EMO (emergency machine off) circuit provided with the SEMI S2-0200 option is considerably different from the standard EMO design due to the incorporation of additional components designed to increase personnel safety. For a complete details on the design of the SEMI-S2-0200 EMO circuit, please consult the schematics on pages 34 (general system schematic), 35 (standard EMO circuit, and 36 (SEMI S2-0200 EMO) found in this product manual. The standard EMO circuit operates as a normally open (N.O.) circuit that, when

28

Conditioned Power Center

Image 28
Contents CPC Series Conditioned Power Center Table of Contents Service and Support E a S E General Safety Ansi Warning NoticesInherent Hazards Alerts and LabelsLine Voltage Present With Machine Power OFF Wear protective gear before servicing internal partsSafety Interlocks Lockout/TagoutProduct Liability Conformance with Applicable Laws and RegulationsEmergency Contact Information Product Overview Product PurposeStandard Features Optional FeaturesFeature Preparation UnpackagingPreparation Figure D Shipping Crate Disassembly 10 to 20 kVA Installation Outer Panel Removal Alternate Conduit Landing LocationsMain Input Circuit Breaker Fixed Input Circuit BreakersIsolation Transformer Programmable Circuit BreakersTransformer Primary Voltage Adjustment Figure GOutput Voltage Fine Adjustment GroundingLockout/Tagout Procedure Figure JOutput Power Connections Input Power ConnectionsModels With Optional Line Cord/Output Receptacles Energizing the Power Conditioner Restoring For ServiceOperation Energizing the Load Orderly ShutdownConditioned Power Center Phase Loss/Low Voltage Detection and Protection OptionsExternal EMO Seismic AnchorageSemi S2-0200 Certification Input Power Conductor RestraintsSemi S2-0200 Compliant EMO Options Troubleshooting/Maintenance Conditions Requiring TroubleshootingSource Circuit Breaker Trip Input Circuit Breaker TripsTvss Fault LEDs Illuminate Routine Maintenance Harmonic Filter Circuit Breaker Trips OutTechnical and Service Assistance Customer Service Service and SupportProduct Warranty Specifications CPC Series SchematicGPI Series 2000 Standard EMO GPI Series 2000 Semi S2 EMO Output Voltage Fine Adjustment Important ALL Work to be Done By a Licensed ElectricianDocument Revision History Title Rev. Letter Rel. Date Next Rev. LevelSM5505- Rev. a 03/01/2006, 2006 ETA Systems39