Sierra 830, 860, 840 Mass Flow Controller Operation, Electromagnetic Valve Controllers

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Chapter 3 Operation

Series 830/840/860 Instruction Manual

 

 

Caution! During operation, the mass flow controller valve becomes hot.

Mass Flow Controller Operation

Electromagnetic Valve Controllers

When the transducer is installed and the system has undergone a complete leak check:

1.Make sure the set point is zero before applying power. If the set point input is not connected to some type of control device, set the valve on/off switch in the off position. (No connection may cause the setpoint to float). Note: The valve opens mo- mentarily when power is first applied.

2.Apply power. Allow thirty minutes of warm-up time. (When power is first applied, the output signal from the transducer remains fixed at a much higher than normal level until the sen- sor warms up to its normal operating temperature range.)

3.Turn on the gas supply. Perform an initial zero output check (only required for first-time start ups). Set flow to zero. Connect a digital multimeter to V+out (4-20 mA out) and COM termi- nals.

4.Check the reading. If it is not within ±50 mV (±0.16 mA) of zero, adjust the zero potentiometer to zero the transducer. (The zero pot is located behind the upper metal button on the side of the transducer or behind the swing-out plastic door.)

5.Adjust the controller set point to the desired flow rate.

Caution: Never leave the controller with no gas supply while supplying a setpoint. The valve will open to its maximum position and eventually overheat causing possible damage to the control circuit. If it is desired to interrupt the gas flow for an extended period, consider utilizing the “Valve-Off” circuit.

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IM-83/84/86-H

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Contents Table of Contents Customer Notice Table of Contents Table of Contents Troubleshooting List of Tables Table of Contents Introduction Using This ManualIntroduction Technical Assistance Safety InformationReceipt of System Components Flow Paths through the Transducer Series 800 Flow Sensing PrincipleSensor Temperature Distribution Installation Installation Overview VCO Fittings Installing the TransducerCompression Fittings NPT Fittings and 1/2-Inch Connections All Types VCR FittingsRecommended Wire Gauges Wiring the TransducerRecommended Wire Gauges Output Signal Connections Wiring Transducers with 20-Pin Card-Edge Connectors InputInput Signal Connections Controllers Only Depending on the valve voltage, connect as shown below Valve Purge and Valve Off Connections Controllers OnlyPin Connector Pin Designations Input Power Connections Wiring Transducers with 15-Pin D-ConnectorsInput Signal Connections Controllers Only 13. Valve Purge and Valve Off 15-Pin D-Connector 15 -Pin D-Connector Pin Assignments 16. Motor-Operated Rotary Valve Connector 10-Pin Connector Motor-Operated Valve Circular 10-Pin ConnectorMass Flow Meter Operation OperationElectromagnetic Valve Controllers Mass Flow Controller OperationMotor-Operated Rotary Valve Controllers Over-Range and Cold Sensor Lockout Circuit Mass Flow Controller FeaturesController Auto Shut-Off Feature Soft Start Response Times On-Off Control and Soft Start OptionPurging Reactive Gases Valve Purge FunctionPurging Non-Reactive Gases Operation Cleaning the Laminar Flow Element Flow Path MaintenanceLow Flow Transducers Low Flow Transducer LFE CleaningMedium Flow Transducers Medium Flow Transducer LFE CleaningHigh Flow Transducers High Flow Transducer LFE CleaningNPT-Type Transducers NPT Transducer LFE CleaningSensor Cleaning and Inspection Sensor MaintenanceSensor Electrical Test Electromagnetic Valves Low and Medium Flow Controllers Valve MaintenanceElectromagnetic Valves High Flow Controllers Maintenance Motor-Operated Rotary Valves 840 L, M and H series Valve Adjustment Procedure Maintenance Maintenance Transducer Calibration Troubleshooting Flow Meters and Flow Controllers with Electromagnetic Valves Valve rotates continuously Flow Controllers with Motor-operated Rotary ValvesFactory Calibration-All Models Instructions for Returning Your Instrument for ServiceReturn Address Example 2 Finding the Actual Flow Rate Conversion of Flow Rate to Other T and P ConditionsExample 1 Changing Standard Conditions 14.7 460 + 10.00 = 3.47 lm 14.7 + Calculating For a Single Gas 880 Example Important Note about K-FACTORS Calculating Dual Gas MixturesNEO Gas Tables and K-factorsC2H6O CH 3SH Operating Specifications Appendix B Product SpecificationsVDC Physical Specifications Performance SpecificationsValve plug standard Neoprene, 4079 Kal-Rez Low Flow Body Transducer Mounting DimensionsMedium Flow Body High Flow Body Appendix B Specifications IM-83/84/86-H Flow Range, slpm NPT Flow Body100 200 Inlet Fnpt Appendix B Specifications

840, 830, 860 specifications

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