Sierra 860, 840, 830 instruction manual CH 3SH

Page 63

Series 830/840/860 Instruction Manual

Appendix A

 

 

 

Chemical

K-factor

Cp

Density

 

Elastomer

Actual Gas

Symbol

Relative N2

(Cal/g)

(g/l) @ 0°C

O-ring* Valve Seat

Methyl Mercaptan

CH3SH

.52

.2459

2.146

 

KR

Methyl Trichlorosilane

(CH3) SiCl3

.25

.164

6.669

 

KR

Molybdenum Hexafluoride

MoF6

.21

.1373

9.366

 

KR

Monoethylamine

C2H5NH2

.35

.387

2.011

 

KR

Monomethylamine

CH3NH2

.51

.4343

1.386

 

KR

Neon

NE

1.46

.245

.900

 

 

Nitric Oxide

NO

.990

.2328

1.339

 

 

Nitrogen

N2

1.000

.2485

1.25

 

 

Nitrogen Dioxide

NO2

.74

.1933

2.052

 

 

Nitrogen Trifluoride

NF3

.48

.1797

3.168

 

KR

Nitrosyl Chloride

NOCl

.61

.1632

2.920

 

KR

Nitrous Oxide

N2O

.71

.2088

1.964

 

 

Octafluorocyclobutane

C4F6

.17

.185

8.397

 

KR

(Freon-C318)

 

 

 

 

 

 

Oxygen Difluoride

OF2

.63

.1917

2.406

 

 

Oxygen

O2

1.000

.2193

1.427

 

 

Ozone

O3

.446

.3

2.144

 

 

Pentaborane

B5H9

.26

.38

2.816

 

KR

Pentane

C5HI2

.21

.398

3.219

 

KR

Perchloryl Fluoride

CIO3F

.39

.1514

4.571

 

KR

Perfluoropropane

C3F8

.174

.197

8.388

 

KR

Phosgene

COCl2

.44

.1394

4.418

 

KR

Phosphine

PH3

1.070

.2374

1.517

 

KR

Phosphorous Oxychloride

POCl3

.36

.1324

6.843

 

KR

Phosphorous Pentafluoride

PH5

.30

.1610

5.620

 

KR

Phosphorous Trichloride

PCl5

.30

.1250

6.127

 

KR

Propane

C3H8

.36

.3885

1.967

 

KR

Propylene

C3H6

.41

.3541

1.877

 

KR

Silane

SiH4

.60

.3189

1.433

 

KR

Silicon Tetrachloride

SiCl4

.28

.1270

7.580

 

KR

Silicon Tetrafluoride

SiF4

.35

.1691

4.643

 

KR

Sulfur Dioxide

So2

.69

.1488

2.858

 

KR

Sulfur Hexafluoride

SF6

.26

.1592

6.516

 

KR

Sulfuryl Fluoride

SO2F2

.39

.1543

4.562

 

KR

Teos

 

.090

 

 

KR

KR

Tetrafluorahydrazine

N2F4

.32

.182

4.64

 

KR

Trichlorofluormethane

CCl3F

.33

.1357

6.129

 

KR

(Freon-11)

 

 

 

 

 

 

Trichlorisilane

SiHCl3

.33

.1380

6.043

 

KR

1,1,2-Trichloro-1,2,2

CCl2FCClF2

.20

.161

8.360

 

KR

Trifluorethane (Freon-113)

 

 

 

 

 

 

Trisobutyl Aluminum

(C4H9)Al

.061

.508

8.848

 

KR

Titanium Tetrachloride

TiCl4

.27

.120

8.465

 

KR

Trichloro Ethylene

C2HCl3

.32

.163

5.95

 

KR

Trimethylamine

(CH3)3N

.28

.3710

2.639

 

KR

Tungsten Hexasfuoride

WF6

.25

.0810

13.28

KR

Teflon

Uranium Hexafluoride

UF6

.20

.0888

15.70

 

KR

Vinyl Bromide

CH2CHBr

.46

.1241

4.772

 

KR

Vinyl Chloride

CH2CHCl

.48

.12054

2.788

 

KR

Xenon

Xe

1.44

.0378

5.858

 

 

IM-83/84/86-H

A-9

Page 62 Page 64
Image 63
Page 62 Page 64
Contents
Table of Contents Customer Notice Table of Contents Table of Contents Troubleshooting List of Tables Table of Contents Introduction Using This ManualIntroduction Safety Information Receipt of System ComponentsTechnical Assistance Flow Paths through the Transducer Series 800 Flow Sensing PrincipleSensor Temperature Distribution Installation Installation Overview Installing the Transducer Compression FittingsVCO Fittings NPT Fittings and 1/2-Inch Connections All Types VCR FittingsRecommended Wire Gauges Wiring the TransducerRecommended Wire Gauges Output Signal Connections Wiring Transducers with 20-Pin Card-Edge Connectors InputInput Signal Connections Controllers Only Depending on the valve voltage, connect as shown below Valve Purge and Valve Off Connections Controllers OnlyPin Connector Pin Designations Input Power Connections Wiring Transducers with 15-Pin D-ConnectorsInput Signal Connections Controllers Only 13. Valve Purge and Valve Off 15-Pin D-Connector 15 -Pin D-Connector Pin Assignments 16. Motor-Operated Rotary Valve Connector 10-Pin Connector Motor-Operated Valve Circular 10-Pin ConnectorMass Flow Meter Operation OperationElectromagnetic Valve Controllers Mass Flow Controller OperationMotor-Operated Rotary Valve Controllers Mass Flow Controller Features Controller Auto Shut-Off FeatureOver-Range and Cold Sensor Lockout Circuit Soft Start Response Times On-Off Control and Soft Start OptionValve Purge Function Purging Non-Reactive GasesPurging Reactive Gases Operation Cleaning the Laminar Flow Element Flow Path MaintenanceLow Flow Transducers Low Flow Transducer LFE CleaningMedium Flow Transducers Medium Flow Transducer LFE CleaningHigh Flow Transducers High Flow Transducer LFE CleaningNPT-Type Transducers NPT Transducer LFE CleaningSensor Cleaning and Inspection Sensor MaintenanceSensor Electrical Test Electromagnetic Valves Low and Medium Flow Controllers Valve MaintenanceElectromagnetic Valves High Flow Controllers Maintenance Motor-Operated Rotary Valves 840 L, M and H series Valve Adjustment Procedure Maintenance Maintenance Transducer Calibration Troubleshooting Flow Meters and Flow Controllers with Electromagnetic Valves Valve rotates continuously Flow Controllers with Motor-operated Rotary ValvesFactory Calibration-All Models Instructions for Returning Your Instrument for ServiceReturn Address Conversion of Flow Rate to Other T and P Conditions Example 1 Changing Standard ConditionsExample 2 Finding the Actual Flow Rate 14.7 460 + 10.00 = 3.47 lm 14.7 + Calculating For a Single Gas 880 Example Important Note about K-FACTORS Calculating Dual Gas MixturesNEO Gas Tables and K-factorsC2H6O CH 3SH Operating Specifications Appendix B Product SpecificationsVDC Physical Specifications Performance SpecificationsValve plug standard Neoprene, 4079 Kal-Rez Low Flow Body Transducer Mounting DimensionsMedium Flow Body High Flow Body Appendix B Specifications IM-83/84/86-H Flow Range, slpm NPT Flow Body100 200 Inlet Fnpt Appendix B Specifications
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