Series 830/840/860 Instruction Manual | Appendix A |
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For our purposes, we want the ratio of the flow rate, Q1, for an ac- tual gas to the flow rate of a reference gas, Q2, which will produce the same output voltage in a particular mass flow meter or control- ler. We get this by combining equations (1) and (5):
Q1/Q2 = K1/K2 = (N1/ ρ1Cp1)/(N2/ρ2CP2) | (6) |
Please note that the constant b cancels out. Equation (6) is the funda- mental relationship used in the accompanying tables. For conven- ience, the tables give “relative”
Kactual/KN2 where the reference gas is the commonly used gas, nitrogen (N2). The remaining columns give Cp and ρ, enabling you to calculate K1/K2 directly using Equation (6). In some instances, K1/K2 from the tables may be different from that which you calculate directly. The value from the tables is preferred because in many cases it was ob- tained by experiment. Sierra calibrates every transducer with primary standards using the actual gas or a molecular equivalent reference gas. The calibration certificate accompanying the transducer cites the refer- ence gas used.
Example 1:
A transducer is calibrated for nitrogen (N2), and the flow rate is 1000 sccm for a 5.000 VDC output signal. The flow rate for car- bon dioxide at a 5.000 VDC output is:
QCO2/QN2 = KCO2/K N2, or
QCO2 = (0.74/1.000)1000 = 740 sccm
Example 2:
A transducer is calibrated for hydrogen (H2), and the flow rate is 100 sccm for a 5.000 VDC output signal. The flow rate for nitrous oxide (N2O) is found as follows:
QN2O/QH2 = K N2O/K H2, or
Q N2O = (0.71/1.01) 100 = 70.3 sccm
Note that the
Example 3:
We want a transducer to be calibrated for use with dichlorosilane (SiH2Cl2) at a 100 sccm full scale flow. We wish to use the pre- ferred reference gas
| QSiH2CL2 /QCF4 = K SiH2CL2 /K CF4 |
| 100/Q CF4 = 0.869 |
| Q CF4 = 100/0.869 = 115 sccm |