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3200, 3200ST, 3400, 3400ST manual
1
1
26
26
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26 pages, 829.63 Kb
FMA 3200/3200ST/3400/3400ST Series
Thermal Mass Flow Controllers
Contents
Main
Page
TABLE OF CONTENTS
A.
Introduction
drop
B.
Installation
Page
Page
Page
Page
Page
Page
Page
Page
C.
Operation
Q1 / Q2 = K1 / K2
Q1 = (K1 / K2) Q2
Example 1
Example 2
Page
Page
D.
Maintenance and Product Care
E.
M-4271/0707, pg. 19 of 26
Specifications
Page
Page
G.
Gas K Factors
Gas Chemical Symbol K Factor
H.
Troubleshooting Guide
Symptom Possible Cause Method of Correction
