Philips Magnetoresistive Sensor manual Appendix 3 Sensor Layout, KMZ10 chip structure 2000 Sep

Philips Semiconductors

Magnetoresistive sensors for

magnetic field measurement

General

APPENDIX 3: SENSOR LAYOUT

In Philips’ magnetoresistive sensors, the permalloy strips are formed into a meander pattern on the silicon substrate. With the KMZ10 (see Fig 25) and KMZ51 series, four barber-pole permalloy strips are used while the KMZ41 series has simple elements. The patterns used are

different for these three families of sensors in every case, the elements are linked in the same fashion to form the four arms of a Wheatstone bridge. The meander pattern used in the KMZ51 is more sophisticated and also includes integrated compensation and flipping coils (see chapter on weak fields); the KMZ41 is described in more detail in the chapter on angle measurement.

handbook, full pagewidth

MBC930

Fig.25 KMZ10 chip structure.

2000 Sep 06 21