Philips Magnetoresistive Sensor

2000 Sep 06 21

Philips Semiconductors

Magnetoresistive sensors for

magnetic ﬁeld measurement General

APPENDIX 3: SENSOR LAYOUT

In Philips’ magnetoresistive sensors, the permalloy strips

areformed into a meander pattern on the silicon substrate.

With the KMZ10 (see Fig 25) and KMZ51 series, four

barber-pole permalloy strips are used while the KMZ41

series has simple elements. The patterns used are

different for these three families of sensors in every case,

theelements are linked in the same fashion to form the four

arms of a Wheatstone bridge. The meander pattern used

in the KMZ51 is more sophisticated and also includes

integratedcompensation and ﬂipping coils (see chapter on

weakﬁelds); the KMZ41 is descr ibed in more detail in the

chapter on angle measurement.

Fig.25 KMZ10 chip structure.

handbook, full pagewidth

MBC930