WARNING
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High voltages (up to 480 V) can kill. Always break the primary circuit to the power supply before starting to work on the heater and/or its wiring.
WARNING
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Diffusion pumps are typically cleaned with acetone, alcohol, or other solvents.
When heated, sprayed or exposed to high temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do Not Use Near A
Acetone, alcohol, and other solvents are irritants, narcotics, depres- sants, and/or carcinogenics. Their inhalation and/or ingestion may pro- duce serious effects. Prolonged or continued contact with the skin will result in absorption through the skin and moderate toxicity. Always ensure that cleaning operations are carried out in large,
WARNING
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Varian has no control over the types of gases passing through this pump. These are entirely under the control of the process user and/or the hardware systems integrator. Frequently, process gases are toxic, flammable, corrosive, explosive, or otherwise reactive. Since these gases can cause serious injury or death, it is very important to plumb the exhaust of the pump to the facility’s hazardous gas exhaust system which incorporates appropriate filters, scrubbers, etc., to insure that the exhaust meets all air and water pollution control regulations
WARNING
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Certain gases can become corrosive and toxic when trapped in oil. Always wear protective gloves when handling dirty pump oil, drain it into a closable container, and do not breathe the fumes of the oil. Always use fully