SECTION IV
TROUBLESHOOTING
4-1 LEAKAGE
Analysis of general operational experience with diffusion pumps indicates that certain locations are more prone to the incidence of leaks. The following locations should be checked first if leakage is the suspected cause of poor system performance.
a.Inlet and foreline connections.
b.Drain and fill plugs.
c.Other compression fittings, such as
d.Threaded connections, such as a foreline gauge.
4-2 OUTGASSING
To estimate the gas load, isolate the system from all pumps after evacuation and measure the rate of pressure increase. The gas load can be estimated as follows:
V x ∆P
Q = ______
∆ t
where V is the isolated volume, ∆P is the pressure rise, and ∆t time period of measurement.
4-3 POOR PUMP OR SYSTEM PERFORMANCE
Before proceeding with a program of
Table
Fault | Probable Cause | Corrective Action |
|
|
|
| Leaks in system, virtual or real | Locate and repair. |
|
|
|
| High process gas load | Measure gas load, eliminate |
|
| cause. |
|
|
|
| System dirty | Clean system to reduce |
|
| outgassing. |
|
|
|