Sierra SL-800 instruction manual Calibration of Mass Flow Controllers MFCs

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7.5Vacuum Comparison of Cal=Trak with Sonic Nozzle Transfer Standards

The Cal=Trak operates similarly in both pressure and suction applications. Sometimes, however, users wish to compare the Cal=Trak under suction (vacuum) conditions. With a calibrated sonic nozzle, a simple setup such as that shown in Figure 10 can be used with the inlet to the Cal=Trak flow cell at atmospheric pressure. There is one precaution, however. The sonic nozzle’s pressure must be measured during the Cal=Trak cycle to obtain the actual flow that the Cal=Trak is measuring. In turn, the pressure transducer must not be upset by the Cal=Trak’s initial pressure pulse and must have rapid response relative to the Cal=Trak cycle time. This method is therefore most suitable for flows in the lower part of a Cal=Trak’s range.

It should be noted that cycling of the Cal=Trak would cause a slight change in the nozzle’s inlet pressure. Even though the pressure transducer is read during the Cal=Trak cycle, the nozzle may not achieve internal thermal equilibrium during the cycle, slightly reducing accuracy.

Pressure

Transducer

Sonic Nozzle

Vacuum Pump

DryCal

Cal=Trak

Stable Pressure

>Critical

Figure 10 Vacuum Setup for Sonic Nozzle Transfer Standard

7.6Calibration of Mass Flow Controllers (MFCs)

Modern mass flow controllers have fast response times on the order of milliseconds. They can simply be connected to an appropriate inert gas source and their output stream applied to the Cal=Trak, as in Figure 11. Proper calibration consists of comparing the Cal=Trak reading to the MFCs actual indicated flow and not to its control signal.

If a slow flow controller is to be calibrated, it is best to calibrate it in its metering mode. Apply the appropriate signal to fully open the controller’s internal valve (full scale or digital “open), and calibrate the device as shown for mass flow meters (MFMs), below.

Remember that the Cal-Trak is designed to be operated at ambient pressure. If the outlet pressure of the MFC is atmospheric, then Figure 9 is correct. If the outlet pressure of the MFC is above ambient, insert a back-pressure regulator and a pressure gauge between the MFC and the Cal=Trak. Adjust the back pressure regulator until the pressure gauge reads the correct pressure for the MFC under test (usually the same pressure the device will see in its normal operation). Calibrate under the actual operating pressures with the outlet of the Cal=Trak at atmospheric pressure.

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Contents Cal=Trak SL-800 Primary Gas Flow Calibrator Worldwide Locations to Serve You Table of Contents Page Theory of Operation General DescriptionIdealized Automatic Piston Prover Your Cal=Trak SL-800 Base Includes Cal=Trak Layout Unpacking ChecklistEach of Your Cal=Trak SL-800 Flow Cells Includes Attaching Flow Cells Cal=Trak Installation Attaching & Removing Flow CellsConnecting the Cal=Trak to a Flow Source Cal=Trak Measurement CycleInitial Pressure Pulse Timing KPa Begins Ends Initial Pressure Pulse Application PrecautionsInventory Dead Volume Comparison vs. Calibration Setup for Piston or Bell Provers Vacuum Comparison of Cal=Trak with Piston or Bell Provers Alternative Setup for Piston ProversComparison of Cal=Trak with Sonic Nozzle Transfer Standards Setup for LFEsCalibration of Mass Flow Controllers MFCs Vacuum Setup for Sonic Nozzle Transfer StandardCalibration of Rotameters Variable Area Flow Meters Calibration of Mass Flow Meters MFMsTurning the Cal=Trak Off Charging the Cal=Trak BatteryOperating Instructions Turning the Cal=Trak OnCal=Trak Keypad How To Use the Cal=Trak Keypad Low Battery IndicatorGeneral Menu Navigation Factory Default Settings Parameters Factory Settings Optional SettingsTaking Readings Option 1, Sensor Factor Setting User PreferencesSetup Menu 4, Date, Time & Battery Voltage Setup Menu 2, Reading Type, # in Average & Minutes/ReadingOption 3, Auto Off Setup Menu 5, Date & Time FormatsOption 1, Date Option 2, TimeBattery System Battery Maintenance & StorageMaintenance To Initiate the Leak Test Quality Assurance Leak Test ProcedureLeak Test Illustration Leak Test in Progress CalibrationPart Description Returning Your Unit for Calibration or Service ShipmentReplacement Parts & Accessories Calibration IncludesAdditional Information Limited Warranty Unit suddenly turns off Charge LED does not light when charger pluggedSettings have been lost or seem to have changed Piston Error appears on displayPiston does not move when the Read or Auto is pushed When taking readings, the flow seems offDuring Leak Test, Leakage 9.999 ccm appears on display Contact Sierra for Assistance Resetting the Cal=TrakFlow Cell Standardized 15-30C Model Optimum Flow RangeWorksheet descriptions Installation Operating Instructions for Cal=Soft SoftwareIntroduction RequirementsIntroduction Setup Cal=TrakSetup Cal=Soft Setup DUTPage Page Automatic Flow Calibration Using Sierra 100 Series MFC Software Troubleshooting Serial Port Selection IssueSerial Port Configuration Issue