Table of Contents
Section 1 |
|
General Information | |
Overview | |
Limited Warranty | |
Safety Notice | |
Receiving | |
Storage | |
Unpacking | |
Handling | |
Section 2 |
|
Installation & Operation | |
Overview | |
Location | |
Clean Room | |
Mounting a Stage to the Machine Base and Payload To Stage | |
LMAC Linear Induction Motor | |
LMBR Series Brush DC Linear Servo Motor | |
LMBL Series | |
Brushless Linear Iron Core Servo Motor | |
Modular Magnet Track | |
LMCF Series Brushless Linear Cog Free Servo Motor | |
LMNC Moving Coil Type | |
LMNM Moving Magnet Type | |
LMPY Series Polynoid Linear Motor Holding Option | |
LMSS Series Linear Stepper | |
Roller Bearing Motor | |
Air Bearing Motor | |
LMDS Series Dual Axis Linear Stepper Motor | |
Positioning Stages | |
Unpacking | |
Handling and General Guidelines | |
Stage Specifications Disclaimer | |
LSE Series | |
LSC Series | |
LSS Series | |
LSX Series |
Continued on next page
MN1800 | Table of Contents i |