Manuals / Sigma / Computer Equipment / Computer Monitor

Sigma SQM-160 manual User’s Guide, Rate/Thickness Monitor, Version, Σ Sigmainstruments

Models: SQM-160

1 35

Download 35 pages 41.43 Kb

Page 1

SQM-160

SQM-160

Rate/Thickness Monitor

User’s Guide

Version 2.0

© Copyright Sigma Instruments, Inc. 2000

ΣSigmainstruments

Image 1

Sigma SQM-160 manual User’s Guide, Rate/Thickness Monitor, Version, Σ Sigmainstruments

Contents

User’s Guide SQM-160Rate/Thickness Monitor VersionSafety Symbols Safety InformationLimitation of Warranty Warranty InformationReturn Policy Chapter Table of ContentsQuick Start OperationAppendix MaintenanceFuse Replacement A. Material Parameters B. Specifications C. I/O Connections1.0 Introduction 1.1 InstallationChapter Quick StartChapter Front Panel ControlsQuick Start 1.2 Front PanelRear Panel Connections 1.3 Rear PanelChapter Quick StartSystem Components 1.4 System ConnectionsChapter Quick StartChapter 1.5 Film SetupQuick Start Chapter 1.6 Depositing a FilmQuick Start 2.1 Menu Selection 2.0 IntroductionChapter Operation1. Refer to the section on Sensor Selection for instructions on setting SENS AVG 2.2 Film Parameters SetupChapter OperationFilm Selection Film Parameters Menu DefaultSub-Menu Display DENSITY TOOLING1. Refer to the section on Sensor Tooling for instructions on setting xTOOLING 2.3 System Parameters SetupChapter OperationDisplay TIMEBASE SIM MODE FRQ DISP RATE RES RATEFILT BAUDRATE ETCH System Parameters MenuDefault ChapterDisplay R/T BNDS RATE MIN RATE MAX THICKMIN THICKMAX Display xTOOLING FMIN/MAX FREQ MIN FREQ MAXDefault DefaultSensor status can be seen by observing the Crystal Status LEDs If the LED is not illuminated, the crystal is disabled 2.4 Sensor SelectionChapter OperationChapter 2.5 Sensor Min/Max FrequencyOperation Chapter 2.6 Sensor ToolingOperation Substrate Substrate2.8 Crystal Life Display 2.7 Rate/Thickness or Frequency DisplayChapter Operation2.10 Shutter Operation 2.9 Zero Thickness2.11 Simulate Mode Chapter3.0 Introduction 3.1 InstallationChapter Options3.3 Analog Output Card 3.2 Four Sensor CardChapter Options4.0 Introduction 4.1 Installation4.2 Run MonComm ChapterTo add a new film to the Films List 4.3 Add and Delete FilmsTo delete a film from the Films List ChapterTo add or replace a film in the Download List 4.4 Download FilmsTo remove a film from the Download List To download the films in the Download ListChapter 4.5 Graph DataMonComm Software 4.6 Save Data To Adjust the Graph’s ScopeChapter MonComm Software4.7 Edit System Parameters 4.8 Load DefaultsChapter MonComm Software5.0 Introduction 5.1 Fuse ReplacementMaintenance ChapterAppendix A. Material ParametersGeneral Specifications Appendix B. SpecificationsAccessories MeasurementPins Relay I/O Connector Rear ViewAppendix C. I/O Connections TypeAppendix D. Declaration of Conformity SafetyManufacturer’s Name Sigma Instruments Manufacturer’s Address 1318 Duff Drive